參考文獻 |
[1]. M. C. Rocco, et al. (Eds.), Nanotechnology research directions, Kluwer Academic Publishers, March 2000.
[2]. D. J. Resnick, et al., “Imprint lithography for integrated circuit fabrication”, The Journal of Vacuum Science and Technology, Vol.21, pp. 2624-2631, November 2003.
[3]. S. Hosoe, “Laser interferometric system for displacement measurement with high precision”, Nanotechnology, Vol.2, pp.88-95, April 1991.
[4]. Y. Jourlin, et al., “Compact diffractive interferometric displacement sensor in reflection”, Precision Engineering, Vol.22, pp.1-6, January 2002.
[5]. O. G. Helleso, et al., “Interferometric displacement sensor made by integrated optics on glass”, Sensors and Actuators A, Vol.47, pp.478-481, April 1995.
[6]. T. Kubota, et al., “Interferometer for measuring displacement and distance”, Optics Letters, Vol.12, pp.310-312, May 1987.
[7]. G. E. Sommargren, “Optical heterodyne profilometry”, Applied Optics, Vol.20, pp.610-618, February 1981.
[8]. O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement”, Applied Optics, Vol.25, pp.3137-3140, September 1986.
[9]. T. Suzuki, et al., “Phase locked laser diode interferometry for surface profile measurement”, Applied Optics, Vol.28, pp.4407-4410, October 1989.
[10]. P. J. Caber, “Interferometric profiler for rough surfaces”, Applied Optics, Vol.32, pp.3438-3441, July 1993.
[11]. H. Maruyama, et al., “Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness”, Applied Optics, Vol.41, pp.1315-1322, March 2002.
[12]. S. D. Nicola, et al., “Reflective grating interferometer for measuring the refractive index of transparent materials”, Optics Communications, Vol.118, pp.491-494, August 1995.
[13]. M. H. Chiu, et al., “Refractive-index measurement based on the effects of total internal reflection and the uses of heterodyne interferometry”, Applied Optics, Vol.36, pp.2936-2939, May 1997.
[14]. M. H. Chiu, et al., “Complex refractive-index measurement based on Fresnel’s equations and the uses of heterodyne interferometry”, Applied Optics, Vol.28, pp.4407-4410, July 1999.
[15]. M. Neviνre, et al., “High-accuracy translation–rotation encoder with two gratings in a Littrow mount”, Applied Optics, Vol.38, pp.67-76, January 1999.
[16]. Y. Huang and C. H. Menq, “Design and development of a large range linear encoder with subnanometer resolution”, Review of Scientific Instruments, Vol.77, pp.105104-1 - 105104-11, October 2006.
[17]. N. B. Yim, et al., “Dual mode phase measurement for optical heterodyne interferometry”, Measurement Science and Technology, Vol.11, pp.1131-1137, August 2000.
[18]. F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics”, Measurement Science and Technology, Vol.9, pp.1024-1030, April 1998.
[19]. C. M. Sutton, “Non-linearity in length measurement using heterodyne laser Michelson interferometry”, Journal of Physics E: Scientific Instruments, Vol.20, pp.1290-1292, October 1987.
[20]. J. Lawall and E. Kessler, “Michelson interferometry with 10 pm accuracy”, Review of Scientific Instruments, Vol.71, pp.2669-2676, July 2000.
[21]. D. Xiaoli and S. Katuo, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry” Measurement Science and Technology, Vol. 9, pp.1031-1035, March 1998.
[22]. M. Neviνre, et al., “High-accuracy translation–rotation encoder with two gratings in a Littrow mount”, Applied Optics, Vol.38, pp.67-76, January 1999.
[23]. J. Dyson, “Common path interferometer for testing purpose”, Applied Optics, Vol.47, pp.386-387, November 1956.
[24]. C. L. Koliopoulos, “Radial grating lateral shear heterodyne interferometer”, Applied Optics, Vol.19, pp.1523-1528, May 1980.
[25]. C. C. Hsu, et al., “Reflection type heterodyne grating interferometry for in-plane displacement measurement”, Optics Communications, Vol.281, pp.2582-2589, May 2008.
[26]. G. Zhou and F. S. Chau, “Grating-assisted optical microprobing of in-plane and out-of-plane displacement of microelectromechanical device”, Journal of Microelectromechanical System, Vol.15, pp. 388-395, April 2006.
[27]. Y. T. Liu, et al., “Precision position control using combined piezo-VCM actuators”, Precision Engineering, Vol.29, pp. 411-422, October 2005.
[28]. L. Chassagne, et al., “Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics”, Measurement Science and Technology, Vol.16, pp. 1771-1777, September 2005.
[29]. H. J. Pahk, et al., “Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation”, International Journal of Machine Tools and Manufacture, Vol.41, pp.51-63, January 2001.
[30]. H. Liu, et al., “A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation”, Journal of Micromechanics and Microengineering, Vol.13, pp.295-299, March 2003.
[31]. W. H. Stevenson, “Optical frequency shifting by means of a rotating diffraction grating”, Applied Optics, Vol.9, pp.649-652, March 1970.
[32]. M. P. Kothiyal and C. Delisle, “Optical frequency shifter for heterodyne interferometry using counterrotating wave plates”, Optics Letters, Vol.9, pp.319-321, August 1984.
[33]. D. C. Su, et al., “A heterodyne interferometer using an electro-optic modulator for measuring small displacements”, Journal of Optics, Vol 27, pp.19-23, January 1996.
[34]. P. Zeeman, “The effect of magnetisation on the nature of light emitted by a substance”, Nature, Vol.55, pp.347, February 1987.
[35]. J. Y. Lee, et al., “Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution”, Sensors and Actuators A, Vol. 137, pp.185-191, June 2007.
[36]. K. J. Gåsvik, Optical metrology, Third Edition, John Wiley & Sons, February 2003.
[37]. S. O. Kasap, Optoelectronics and photonics, Prentice Hall Inc., New Jersey, 2001.
[38]. Stanford Research System, Model SR850 DSP Lock-In Amplifier, 1992.
[39]. K. Oka, et al., “Real-time phase demodulator for optical heterodyne detection processes”, Measurement Science and Technology, Vol.2, pp.106-110, February 1991.
[40]. F. L. Pedrotti and L. S. Pedrotti, Introduction to optics, Prentice Hall Inc., 1993.
[41]. T. B. Eom, et al., “A simple method for the compensation of the nonlinearity in the heterodyne interferometer”, Measurement Science and Technology, Vol.13, pp. 222-225, January 2002.
[42]. 林正淳,光學機構設計,林正淳,新竹縣,台灣,2008。
[43]. 李貴宇,「波長調制外差式光柵干涉儀之研究」,國立中央大學,碩士論文,民國96年。
[44]. 吳維庭,「準共光程外差光柵干涉術之研究」,國立中央大學,碩士論文,民國97年。
[45]. 黃思翰,「複合式長行程精密定位平台之研究」,國立中央大學,碩士論文,民國98年。
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