博碩士論文 992206022 詳細資訊




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姓名 黃昱嘉(Yu-Chia Huang)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 自我複製式藍光波段全方位高反射鏡
(Autocloned Omni-directional Reflector for Blue Light LED)
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摘要(中) 本論文以光子晶體理論為基礎,設計藍光波段全方位反射鏡,利用有限時域差分法模擬三維光子晶體。在製程上,使用陽極氧化鋁配合自我複製成膜技術製作奈米結構膜,再以電子槍蒸鍍輔以離子源助鍍系統鍍製高反射鏡多層膜堆。一般而言,三維光子晶體的製作通長使用電子束微影等方法,其製程繁瑣且昂貴,而本論文使用陽極氧化鋁的方式製作出二維結構的孔洞陣列基板,使用陽極氧化鋁製程的好處在於大幅節省成本及製作難度,並且可藉由控制電壓、酸液種類、酸液濃度、氧化時間、鹼液種類等等參數,改變基板上孔洞的週期、孔徑大小。相較於昂貴費時的電子束微影,以此方式製作的光子晶體還具備可大面積製作的優勢。此外,配合自我複製成膜技術,利用多層膜高反射鏡的製程,在二維的陽極氧化鋁基板上製作總共25層得對稱膜堆高反射鏡。
最後以多角度的光譜儀量測可見光波段之頻譜,討論光源以60度斜向入射時中心波長的偏移量,與傳統平面多層膜做比較,其中心波長的偏移量有33.3%的抑制效果。因此,本論文中的奈米週期結構之多層膜,可以利用光子能隙的效果達到全方位反射的作用。
摘要(英) Base on the theory of photonic crystal, an omni-directional reflector (ODR) for blue light LED was designed using finite-difference time-domain (FDTD) method. The fabrication method is combining the autocloned multilayer technique with anodized aluminum oxide (AAO) technique. The autocloned multilayer was fabricated using electron beam deposition and ion-beam-assisted deposition (IAD) system to coating multilayer on the AAO substrate..
Traditionally, the fabrication of 3-dimensional photonic crystals were using electron beam lithography technology which is complex and expensive. In this study, we use AAO method to fabricate a two- dimension hole-array substrate. This method is a low cost and easy process. Besides, the period and pore diameter can be controlled by applying the bias voltage, acid and reaction time. To compare with the electron beam lithography process, its large process area is one of the advantages. Then, 25 layers of autocloned multilayer were deposited on the two-dimension AAO substrate to achieve an ODR for blue light LED.
Finally, the reflection of the ODR was measured using a spectrometer under different incident angles. The central wavelength shifting was measured and analyzed at 60̊ of incident angle. To compare with the planar multilayer high reflector, the autocloned multilayer high reflector can reduce 33.3% of central wavelength shifting. So, the autocloned multilayer high reflector performed an ODR for blue light LED successfully.
關鍵字(中) ★ 自我複製式製程
★ 全方位高反射鏡
★ 陽極氧化鋁
關鍵字(英) ★ autocloned process
★ omni-directional reflector(ODR)
★ anodized aluminum oxide(AAO)
論文目次 摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VI
表目錄 X
第一章 緒論 1
1-1研究背景 1
1-2研究動機 2
1-3本文架構 3
第二章 基礎理論 5
2-1發光二極體(LED) 5
2-2全方位反射鏡 6
2-3陽極氧化鋁(AAO) 8
2-4自我複製結構膜成膜機制 9
第三章 自我複製式全方位反射鏡模擬設計 14
3-1有限時域差分法(FDTD) 14
3-1-1 初階設計:膜堆、材料 21
3-1-2 進階設計: 自我複製式結構 23
3-2參數設定及結果 24
3-2-1光子晶體頻帶模擬 24
3-2-2多角度入射模擬 28
3-3以多角度入射模擬自我複製式結構膜 30
第四章 全方位反射鏡元件製作 36
4-1 以陽極氧化鋁成膜法製作基板 36
4-2 單層自我複製式結構膜製作 38
4-2-1 儀器設備 39
4-2-2 不同蒸鍍速率之成膜結果 40
4-2-3 不同離子源轟擊時間之成膜結果 42
4-3 自我複製式高反射鏡膜堆製作 47
第五章 全方位反射鏡特性量測 52
5-1 儀器設備 52
5-2 量測結果 53
第六章 結論與未來工作 58
參考文獻 62
參考文獻 [1] E. Yablonovitch, "Inhibited spontaneous emission in solid-state physics and electronics", Phys. Rev. Lett., 58, 2059-2062 (1987).
[2] S. John, "Strong localization of photons in certain disordered dielectric superlattices", Phys. Rev. Lett. 58, 2486-2488 (1987).
[3] 欒丕綱,陳啟昌,"光子晶體─從蝴蝶翅膀到奈米光子學",第一章,初版,五南圖書出版公司,台北市,2-31 (2006)。
[4] G. S. Schajer, "Measurement of Non-Uniform Residual Stresses Using the Hole-Drilling Method. Part I—Stress Calculation Procedures",J.Eng.Mater.Technol,110,4,338-4344(1988).
[5] Minghao Qi, Elefterios Lidorikis, Peter T. Rakich, Steven G. Johnson, J. D. Joannopoulos, Erich P. Ippen & Henry I. Smith, "A three- dimensional optical photonic crystal with designed point defects", Nature 429, 538-542 (2004)
[6] Klaus During, Sigrun Hippe, Fritz Kreuzaler and Jeff Schell, "Synthesis and self-assembly of a functional monoclonal antibody in transgenic Nicotiana tabacum", Plant Molecular Biology ,Volume 15, Number 2,281-293 (1990).
[7] S. Kawakami, O. Hanaizumi, T. Sato, Y. Ohtera, T. Kawashima, N. Yasuda, Y. Takei, and K. Miura, "Fabrication of 3D photonic crystals by autocloning and its applications", Electronics and Communications in Japan Part Ii-Electronics 82, 43-52 (1999).
[8] 葉渝雯,"自我複製結構膜光學性質之研究",國立中央大學光電科學研究所碩士論文 (2008)
[9] Takashi Sato, Yasuo Ohtera, Naoto Ishino, Kenta Miura, and Shojiro Kawakami, " In-plane light propagation in Ta2O5/SiO2 autocloned photonic crystals", IEEE Journal of quantum electronics, vol. 38, no. 7 (2002)
[10] T. Sato, K. Miura, N. Ishino, Y. Ohtera, T. Tamamura and S. Kawakami, "Photonic crystals for the visible range fabricated by autocloning technique and their application", Opt. Quant. Electron. 34, 63-70 (2002).
[11] Yasuo Ohtera, Teppei Onuki, Yoshihiko Inoue, and Shojiro Kawakami, "Multichannel photonic crystal wavelength filter array for near-infrared wavelengths" , Journal of lightwave technology, vol. 25, no. 2 (2007).
[12] Seunghyun Kim, Gregory P. Nordin, Jinbo Cai, and Jianhua Jiang, "Ultracompact high-efficiency polarizing beam splitter with a hybrid photonic crystal and conventional waveguide structure" , Opt. Lett, 28, 2384-2386 (2003).
[13] H. J. Round, "A note on carborundum", Electrical World 49, 309-310 (1907).
[14] N.Holonyak and S.F.Bevacqua, "Coherent (visible) light emission from Ga(As1-xPx) junctions" , Appl.Phys.Lett.1,82-83(1962).
[15] H. Amano, N. Sawaki, I. Akasaki, and T. Toyoda, "Metal organic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer" , Appl. Phys. Lett. 48, 353-355 (1986).
[16] Y. Koide, N. Itoh, K. Itoh, N. Sawaki, and I. Akasaki, "Effect of AlN buffer layer on AlGaN/a-Al2O3 heterepitaxial growth by metal organic vapor phase epitaxy" , Jpn. J. Appl. Phys. 27, 1156-1161 (1988).
[17] A. Zukauskas, M. S. Shur, and R. Caska, " Introduction to Solid-State Lighting", John Wiley, New York, (2002).
[18] T. Kato, H. Susawa, M. Hirotani, T. Saka, Y. Ohashi, E. Shichi, and S. Shibata, "GaAs/GaAlAs surface emitting IR LED with Bragg reflector grown by MOCVD" , J. Cryst. Growth 107, 832-835 (1991).
[19] K. M. Chen, A. W. Sparks, H. C. Luan, D. R. Lim, K. Wada, and L. C. Kimerling, "SiO2/TiO2 omnidirectional reflector and microcavity resonator via the sol-gel method" , Appl. Phys. Lett. 75, 3805-3807 (1999).
[20] Thomas, "A dielectric omnidirectional reflector", Science 282, 1679-1682 (1998).
[21] J.N. Winn, Shanhui Fan, Chiping Chen, J. Michel, John D. Y. Fink, "A Dielectric Omnidirectional Reflector" , Science 282, 1679 (1998).
[22] E. Nicoletti, D. Bulla, B. Luther-Davies, M. Gu "Wide-angle stop-gap chalcogenide photonic crystals generated by direct multiple-line laser writing", Appl Phys B,105:847–850 (2011).
[23] Yu-Lin Yang, Fu-Ju Hou, Shich-Chuan Wu, Wen-Hsien Huang, Ming-Chih Lai et al. "fabrication and characterization of three-dimensional all metallic photonic crystals for near infrared applications" ,Appl. Phys. Lett. 94, 041122 (2009)
[24] O.Jessensky, "Self-organized formation of hexagonal pore arrays in anodic alumina", Applied Physics Letters, Mar 1998, 1173 – 1175.
[25] F. Li, L. Zhang, and Robert M. Metzger, "On the Growth of Highly Ordered Pores in Anodized Aluminum Oxide ", Chem. Mater. 10 ,2470-2480 , (1998).
[26] G.Patermarakis, J.Chandrinos, K.Masavetas, "Formulation of a holistic model for the kinetics of steady state growth of porous anodic alumina films", J Solid State Electrochem 11: 1191-1204, (2007)
[27] G. E. Thompson, "Porous anodic alumina: fabrication, characterization and application", Thin Solid Films 297 ,192-201, (1997) .
[28] S. Kawakami, T. Kawashima, and T. Sato, "Mechanism of shape formation of three-dimensional periodic nanostructures by bias sputtering", Appl. Phys. Lett., 74(3), 463-465 (1999).
[29] S. Tazawa, S. Matsuo, and K. Saito, "A general characterization and simulation method for deposition and etching technology", IEEE transactions on semiconductor manufacturing, 5(1), 27-33 (1992).
[30] Raymond C. Rumpf, "Design and optimization of nano-optical elements by coupling fabrication to optical behavior", the degree of Doctor of Philosophy in the College of Optics at the University of Central Florida (2006).
[31] M. G. Moharam, Eric B. Grann, Drew A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous couoled-wave analysis of binary gratings", JOSA A, Vol. 12, Issue 5, pp. 1068-1076 (1995).
[32] P. E. Blochl, "Protect augmented wave method", Phys. Rev. B50, 17953-17979 (1994).
[33] Suzuki, Masuo, "Transfer-matrix method and Monte Cario simulation in quantum spin systems", Physical Review B (Condensed Matter), Volume 31, Issue 5, pp.2957-2965,(1985).
[34] 張高德,"廣義光子晶體元件之研究與分析",國立中央大學光電科學研究所博士論文 (2007)
[35] X.P. Feng, Yasuhiko Arakawa, "Off-plane angle dependence of photonic band gap in two-dimensional photonic crystal", IEEE J. Quantum Electron,32, 535 (1996).
[36] F. Zheng, Z. Chen and J. Zhang, " A finite-difference time-domain method without the courant stability conditions", IEEE Microwave Guide Wave Lett., 9, 441 (1999).
[37] K.S.Yee, "Numerical solution of initial boundary value problems involving Maxwall’s equation in isotropic media", IEEE Trans. Antennas and Propagation, 14, 302 (1996).
[38] Te-Hung Chang, Sheng-Hui Chen and Cheng-Chung Lee, Husen-Li Chen,"Fabrication of autocloned photonic crystals using electron-beam guns with ion-assisted deposition", Thin Solid Films, 516, 1051-1055 (2008).
[39] 王淳弘,"自我複製式偏振分光鏡製作與誤差分析",國立中央大學光電科學與工程學系碩士論文(2010)
[40] 翟光耀,光子晶體偏振分光鏡設計與製作,國立中央大學光電科學與工程學系所碩士論文 (2009)
[41] 張德宏,"自我複製結構膜之設計、製作與應用",國立中央大學光電科學與工程學系博士論文 (2009)
[42] 李正中,"薄膜光學與鍍膜技術",第十一章,第五版,藝軒圖書出版社,台北市,314-359 (2006)
指導教授 陳昇暉、李正中
(Sheng-Hui Chen、Cheng-Chung Lee)
審核日期 2012-7-19
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