波長調制外差散斑干涉術應用於角度量測之研究

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姓名

陳思鈞(Szu-Chun Chen) 查詢紙本館藏

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機械工程學系

論文名稱

波長調制外差散斑干涉術應用於角度量測之研究
(Wavelength-modulated heterodyne speckle interferometry for angular displacement measurement)

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摘要(中)

本研究開發一套「波長調制外差散斑干涉術」，可用以進行精密滾轉角度量測。利用雷射二極體之波長可隨外加電流調制的特性，用以產生外差光源，可克服傳統利用旋轉波片、電光調制器及聲光調制器等商用外差光源調制元件所產生之缺點。該波長調制外差散斑干涉術搭配自行開發的相位調解程式，可擷取因待測物旋轉時所引入的角位移變化資訊，藉由弧長與轉動角度間的數學關係式，回推待測物之角位移量。本系統光學原理簡單、易於架設、成本低及待測物表面不需經過特別處理等優點，可克服其他滾轉量測系統的缺點，是一套極具開發價值的滾轉量測系統。
本系統之理論解析度可達1.08 ?deg，考慮環境雜訊、機械振盪等因素，經實驗證明本套系統可量測之最小解析度為0.00048°，靈敏度為0.081°/?deg，系統最大可量測之速度極限為0.29°/s，可量測之最大相對滾轉角度保守估計為0.08°，其原因主要受限於干涉訊號對比度消長的問題。
本論文除了針對可能造成量測系統的誤差進行討論外，也提供可能影響干涉訊號對比度之參數進行測定實驗結果，以期待未來能夠建構出適當的物理模型解釋干涉訊號對比度消長之現象以解決因其現象所造成量測範圍受限之缺憾。

摘要(英)

This study presents a simple method to measure angular displacements by wavelength-modulated heterodyne speckle interferometer. We modulated the wavelength of laser diode by injection current to replace commercial component to produce heterodyne light source. In addition, the speckle interferometer has compact optical arrangement and reduction of the cost. And we designed an algorithm to calculate the phase variation which results from the object movement.
The theoretical predication shows that the resolution is about 1.08 micro-deg. However, the experimental results verified that the minimum resolution is 0.00048° with considering the ambient perturbation and mechanical vibration. Then, the sensitivity can achieve 0.009°/micro-deg and the maximum velocity of measurement limited down to 0.29°/s. Unfortunately, the measurement range was confined because the interference contrast will disappear and grow up repeatedly when the object moves.
The system is quite a potential in domain of rolling measurement if the issue before we mentioned was being solved.

關鍵字(中)

★ 外差干涉術
★ 波長調制
★ 光學量測
★ 角度量測
★ 散斑干涉術

關鍵字(英)

★ optical metrology
★ wavelength-modulated
★ speckle interferometer
★ laser diode
★ heterodyne interferometry
★ angular displacement
★ interference contrast

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
表目錄 vii
圖目錄 viii
第一章緒論 1
1.1研究背景 1
1.2研究目的 2
1.3文獻回顧 3
1.3.1外差干涉術之文獻回顧 3
1.3.2波長調制外差干涉術之文獻回顧 6
1.3.3散斑干涉術之文獻回顧 8
1.3.4角度量測之文獻回顧 11
1.4 論文章節簡介 16
第二章基礎理論 18
2.1外差干涉術 18
2.2波長調制外差干涉系統 19
2.2.1雷射二極體 19
2.2.2波長調制外差干涉術 20
2.3面內位移引入相位變化 23
2.3.1散斑干涉術 24
2.3.2都卜勒移頻 25
2.3.3光柵干涉術 25
2.4面內位移導入角位移變化 26
2.5小結 27
第三章系統架構 29
3.1架構元件與系統介紹 29
3.2波長調制外差散斑干涉系統 31
3.2.1波長調制外差光源系統 32
3.2.2散斑干涉術應用於滾轉量測系統 32
3.2.3相位調解演算法 35
3.3干涉訊號消長相關參數測定實驗系統 36
3.4小結 36
第四章實驗結果與討論 38
4.1旋轉角度量測範圍測定 38
4.1.1旋轉角度量測範圍測定─0.0012° 38
4.1.2旋轉角度量測範圍測定─0.01° 40
4.1.3旋轉角度量測範圍測定─0.1° 41
4.2往返角位移量測定 42
4.2.1往返角位移量測定─0.00048° 42
4.2.2往返角度量測範圍測定─0.006° 43
4.2.3往返角度量測範圍測定─0.01° 44
4.3實驗結果討論 46
4.3.1量測重複性 46
4.3.2量測解析度 47
4.3.3量測靈敏度 47
4.3.4量測速度極限 48
4.4干涉訊號消長現象之參數測定 48
4.4.1往返位移運動之干涉訊號消長狀態測定 49
4.4.2散射面表面狀態與干涉訊號消長關係測定 52
4.4.3對光準直度與干涉訊號消長關係測定 54
4.4.4干涉光束通過透鏡與否與干涉訊號消長關係測定 57
4.4.5收光孔徑大小與干涉訊號消長關係測定 59
4.4.6光偵測器與散射面之距離與干涉訊號消長關係測定 61
4.5小結 64
第五章誤差分析 66
5.1系統誤差 66
5.1.1波長變化誤差 66
5.1.2系統架構對位誤差 67
5.1.3非理想法線對位誤差 68
5.2隨機誤差 69
5.2.1環境振動 69
5.2.2環境溫度 70
5.3小結 70
第六章結論與未來展望 72
6.1結論 72
6.2未來展望 74
參考文獻 77
圖表出處 80

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指導教授

李朱育(Ju-Yi Lee)

審核日期

2012-8-20

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