摘要(英) |
This experiment utilizes traditional powder metallurgy way, mix ITO and WO3 material powder first, and then pressing to shaped, then sintering with the high temperature furnace, deposited different kinds of components on high purity quartz (GE-124AA) by E-gun sputtering finally. The films doped with 5 to 25% of tungsten trioxide to confer with the visible light transmittance and influence on the structure to the thin film.
Show in accordance with the experimental result, with the increase of WO3 content, the lattice will become to small, cause it in the visible transmittance of wavelength (300~700nm) shift to the short wavelength way. While increasing from 5% to 20% in adding amount of WO3, can find the time while increasing the heat treatment, will contribute to the whole structure to change into the crystal structure of In6WO12, brought about the wave shift to long wave side.
Observation the crystal structure with XRD measurement, when rising of WO3 content and anneal temperature the phase of WO3 has the more obvious tendency, but as the adding amount rises to 25%, when heat treatment temperature is 300℃, the crystal structure at this moment is changed into the amorphous, and when improving heat treatment temperature to 500℃, crystal structure at this moment from noncrystalline to change into the crystalline structure of In6WO12. |
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