Structural Study on BaCeO3 Perovskite  Thin Film by Sputtering

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姓名

許大衛(David Hsu) 查詢紙本館藏

畢業系所

國際永續發展碩士在職專班

論文名稱

(Structural Study on BaCeO3 Perovskite Thin Film by Sputtering)

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摘要(中)

Perovskites 結構組成的金屬氧化物於中高溫度(600 – 750C)環境下，以微觀尺度
可觀察到質子由氧原子移動至另一氧原子的情形，此現象被稱為跳躍機制(“hopping”
mechanism)。因為此跳躍機制，Perovskites 結構組成的金屬氧化物比起其他物質擁有較
佳的離子導特性(Proton conduction)，而適合應用於燃料電池、電化學反應、感測器與
氫氣純化。
在本研究中，以金屬氧化物為靶材利用射頻濺鍍(RF sputtering)製備BaCeO3 薄膜於
矽基板與石英基板上，利用表面輪廓儀量測薄膜沉積速率後製備厚度100nm 的均勻薄膜，
接著以不同溫度與時間參數進行快速退火(Rapid Thermal Annealing, RTA)進而產生結晶
結構。經過快速退火後的薄膜將利用X 光繞射儀(X-ray diffraction spectrometer, XRD)
與拉曼光譜儀(Raman spectrometer) 觀察其結晶性、能量色散X 光譜儀(Energydispersive
X-ray spectrometer, EDS or EDX)量測其化學元素組成。本實驗目的在於改
變不同的濺鍍與快速退火條件找出製備Perovskites 結構BaCeO3 薄膜的最佳化參數。

摘要(英)

For proton conduction in the mid- to high-range temperatures (600 – 750C), metal oxide
perovskites provide certain characteristics ideal for applications in fuel cells, electrochemical
reactors, sensors, and hydrogen purification. The capability of conducting protons in metal
oxide perovskites is commonly recognized as a “hopping” mechanism at the microscopic scale,
where protons jump from one oxygen atom to another by Coulombic force at high
temperatures. In this study, we fabricate BaCeO3 thin films by radio frequency sputtering using
metal oxide targets. The films are uniformly deposited on silicon and quartz substrates and
have a thickness of roughly 100 nm. After deposition, all films are subjected to rapid thermal
annealing at various temperatures and time periods in order to achieve crystalline structures.
Specific studies are then perform on the annealed films using surface profiler to determine
deposition rate, X-ray diffraction and Raman spectroscopy for the microstructures, and energydispersive
X-ray spectroscopy for elemental and chemical compositions. The results of these
tests determine a set of optimal parameters for processing BaCeO3 thin films based on the
conditions of deposition and thermal annealing.

關鍵字(中)

★ 薄膜

關鍵字(英)

★ thin film
★ sputtering
★ perovskite

論文目次

CONTENT .................................................................................................................................... v
List of Figures ............................................................................................................................... vi
Chapter 1 Introduction .................................................................................................................... 1
1-1 Introduction ....................................................................................................................... 1
1-2 Objective ........................................................................................................................... 1
1-3 Scope ................................................................................................................................ 2
1-4 Study Layout ..................................................................................................................... 2
CHAPTER 2 Theories and Methods............................................................................................... 3
2-1 Perovskite .......................................................................................................................... 3
2-2 Proton Conduction............................................................................................................. 4
2-3 Applications of Perovskite films ....................................................................................... 6
CHAPTER 3 Experiments .............................................................................................................. 7
3-1 Experimental Procedure .................................................................................................... 7
3-2 Substrate and Material Preparation ................................................................................... 7
3-3 Deposition ......................................................................................................................... 8
3-4 Rapid Thermal Annealing ................................................................................................. 9
3-5 Thickness ........................................................................................................................... 9
3-6 Chrystal Structure .............................................................................................................. 9
3-7 Raman Spectroscopy ....................................................................................................... 10
3-8 Elemental Composition ................................................................................................... 10
CHAPTER 4 Results and Discussion ........................................................................................... 12
4-1 Deposition Rate and Film Thickness .............................................................................. 12
4-2 XRD ............................................................................................................................... 13
4-3 Raman Spectroscopy ....................................................................................................... 15
4-4 EDS Chemical composition ............................................................................................ 16
Chapter 5 Conclusions .................................................................................................................. 18
References .................................................................................................................................... 19

參考文獻

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指導教授

李泉(Li Chuan)

審核日期

2016-7-21

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