P型金屬氧化物薄膜的製備應用於軟性電子

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姓名

王聖博(Sheng-Po Wang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

P型金屬氧化物薄膜的製備應用於軟性電子
(Fabrication of P-Type Metal Oxide Thin Film for Flexible Electronics)

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★ 超導材料釔鋇銅氧化物熱電特性量測分析	★ 鎂矽錫合金熱電特性研究及應用
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★ 物聯網之熱感測器應用	★ P型金屬氧化物與硫化物合金薄膜之研究

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摘要(中)

2005年的IEEE會議上提出了軟性電子的概念，希望能透過更加人性化的設計有效解決不易攜帶或硬質基板碎裂等議題。近年來，穿戴式電子產品的興盛毫無疑問地是引起了熱潮，軟性電子也勢必朝著輕、薄及透明等方面發展，然而，最常用於透明薄膜的ITO卻有著資源即將短缺等不穩定因素，使得資源豐富的氧化鋅成為炙手可熱的研究對象，因此，本論文也將氧化鋅選作為研究對象。
本研究著重於製備p-type氧化鋅粉末，透過熱擴散方式以五氧化二磷選作為摻雜物分別於不同溫度與環境下，並分析粉末之晶格特性以及元素比例，將粉末熱壓成靶材後濺鍍薄膜，以霍爾量測確定薄膜特性。本研究成功製備了p-type氧化鋅粉末，然而，其特性仍不夠理想，希望以這次實驗做為往後改善氧化鋅粉末摻雜之基石。

摘要(英)

In 2005, IEEE conference brought out the idea of flexible electronics, that could be much more humanity to solve the problem of rigid substrate fragmentation or hard to carry and other issues. Last few years, the rise of wearable electronics is undoubtedly caused a boom and flexible electronics will also bound towards more light, thin, transparent and other aspects of development. ITO, the most commonly used in transparent film, lacks in resources and is unstable. However, zinc oxide, that is resource-rich, becomes more popular in study. Therefore, the modulation doping of zinc oxide is the research object in this paper.
This study focuses on the preparation of p-type zinc oxide powder doped by phosphorus pentoxide through thermal diffusion manner at different temperatures and environment. P-type zinc oxide powders were achieved. Subsequently, analysis the characteristics on the powders were carried out before hot pressing to make the bulk target and the sputtering process to study film properties by Hall measurement and Fourier transform infrared spectroscopy.

關鍵字(中)

★ 金屬氧化物
★ 氧化鋅

關鍵字(英)

★ Metal Oxide
★ Zinc Oxide

論文目次

摘要..................................I
ABSTRACT.............................II
致謝................................III
目錄.................................IV
圖目錄...............................VI
第一章簡介與研究動機.................1
1-1 前言..............................1
1-2 研究動機與目的....................2
第二章理論基礎與文獻回顧...............4
2-1 氧化鋅之晶體特性及應用..............4
2-2 氧化鋅摻雜.........................5
2-3 熱擴散摻雜原理......................6
2-4 粉末熱壓...........................6
第三章實驗流程與儀器設備...............8
3-1實驗流程............................8
3-2 實驗製程方法.......................9
3-3 實驗儀器...........................11
第四章實驗結果與結論...................23
4-1 粉末分析...........................23
4-2 薄膜特性分析.......................24
4-3 結論與未來展望.....................25
參考文獻..............................36

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指導教授

辛正倫(Chung-Lun Hsin)

審核日期

2016-10-12

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