在本論文中我們提出了一個新的光波導結構，先利用Beamprop模擬軟體設計一個單一模態傳輸的光波導。傳統漸耦合光波導由於在崩裂手續時會有相當高的難度，因為它需要很準確的20μm光波導長度才能達到最好的響應度，在新的雙階式漸耦合光波導利用光纖波導和耦合波導不一樣的長度則可以避免這個問題。 在元件方面我們利用了電荷補償式單載子光檢測器，由於在collector layer利用了漸變式摻雜，可以使元件的飽和電流有更好表現，另外一個優點是因為漸變式摻雜會有較高的崩潰電壓表現。 利用上面所說的光波導結構與電荷補償式單載子光檢測器，我們可以完成一個應用在１.55μm波長以磷化銦為基板的光檢測器達到響應度為0.9A/W頻寬表現為60GHz。 In this thesis, we demonstrated a high performance charge compensated uni-traveling carrier photodiode (CCUTC-PD) with novel dual-step optical waveguide. The passive dual-step optical waveguide was designed to obtain signal mode propagation in the fiber guide region, and high cleaving tolerance. The optical design and simulation of our demonstrated structure were achieved by using the three-dimensional beam propagation method software. In the aspect of active region, we incorporate the traditional charge-compensated UTC-PD with grading n-doped collector layer to release the trade off between saturation current and breakdown voltage. By way of the combination of dual-step optical waveguide and grading n-doped CCUTC-PD, we can achieve extremely high responsivity 0.9A/W, and high speed performance 60GHz.
