本研究整合半導體製程技術、以及化學生物標定法,來進行人體血清白蛋白之感測。感測器元件材料為砷化鎵,並使用半導體微影製程製作異質接面光電晶體,再利用生物螢光法做生物分子標記。其原理乃利用標記後化合物躍昇至激發態的螢光為生物訊號,對人體血清白蛋白進行感測。 研究中分別對感測器之靈敏度及再現性作多次的測試分析,於再現性的表現上,在待測溶液位於相同濃度之感測結果,其標準差僅達3.39 × 10-9 A;而靈敏度的範圍,經由多次量測分析,在待測溶液濃度介於0.01 mg/mL ~ 0.07 mg/mL之間,其光電流變化大小呈現線性的結果。實驗中並將感測器與微流道系統結合做一完整的量測平台,對量測數據進行分析後得到為Y = 1.6 × 10-6 + 1.38 × 10-8X之關係式,其中的Y值為光電流的大小,單位是安培,X值為HSA溶液之濃度,單位為每微克/毫升。此關係式代表此感測器在HSA溶液濃度介於0.01 mg/mL ~ 0.07 mg/mL之間,濃度每增加1 μg/mL,其光電流的反應約會增加13.8 nA的大小。 In this research, we present bio-sensors fabricated by the semiconductor fabrication and biomark techniques for sensing of Human Serum Albumin (HSA). The GaAs was used as the sensing material to fabricate heterojunction phototransistor array as the sensing device, and the fluorescence phenomenon of the biomark compound was designed as the signal. By combining the sensing device and biomark, a biosensor for HSA detection is demonstrated. Numerous of experiments were tested for the sensitivity and reproducibility of the fabricated sensors. For the reproducibility test, the conditions at the same concentration of HSA were taken for the detection, and the standard deviation of the results was only 3.39 × 10-9 A. And for the sensitivity test, the experiments showed that the sensor demonstrated a linear result in the increase of photo-induced current at the HSA solution concentration of between 0.01 mg/mL and 0.07 mg/mL. Moreover, a micro-flow system of integrating the sensor-array and feed-through setup was established, the experiments showed similar results to the single sensor. The results present a trend line of Y = 1.6 × 10-6 + 1.38 × 10-8X, where Y is the magnitude of photo-induced current, and X is the concentration of HSA solution. It shows that the magnitude of photo-induced current is increased by 13.8 nA when the concentration of HSA solution increases a microgram between 0.01 mg/mL to 0.07 mg/mL.