On the structure and characterization of Al, Sc-co-doped ZnO-films varying with 0-2.37 wt.% Sc contents

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題名:	On the structure and characterization of Al, Sc-co-doped ZnO-films varying with 0-2.37 wt.% Sc contents
作者:	Lin,JC;Peng,KC;Yeh,TY;Lee,SL
貢獻者:	化學工程與材料工程學系
關鍵詞:	HIGHLY TRANSPARENT;OPTICAL-PROPERTIES;RF
日期:	2009
上傳時間:	2010-06-29 17:27:25 (UTC+8)
出版者:	中央大學
摘要:	Thin films of Al, Sc-co-doped ZnO varying with Sc-contents were sputtered on the glass substrate. X-ray diffraction (XRD) of the films revealed wurtzite crystals that were confirmed through the analysis of high resolution transmission electron microscopy (HRTEM). With increasing the Sc-content from 0 to 2.37 wt.% in the films, the optical energy band gap (Eg) was estimated to decrease from 3.25 to 3.20 eV, and the electrical resistivity (Omega cm) decreased from 3.8 x 10(-3) to 1.3 x 10(-3). The decrease in resistivity may be ascribed to electrons tunneling through the horizontal stacking faults induced by Sc-dopants in the films. Published by Elsevier B.V.
關聯:	THIN SOLID FILMS
顯示於類別:	[化學工程與材料工程研究所] 期刊論文

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