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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30105


    Title: Evaluation of four kinds of nonthermal plasma reactor for abatement of perfluorocompounds
    Authors: Lee,HM;Chang,MB;Chen,CW
    Contributors: 環境工程研究所
    Keywords: BARRIER DISCHARGE REACTOR;EMISSIONS;DECOMPOSITION;C2F6;REMOVAL;GASES;CF4;PERFLUOROCARBONS;ENVIRONMENT;REDUCTION
    Date: 2005
    Issue Date: 2010-07-06 16:11:29 (UTC+8)
    Publisher: 中央大學
    Abstract: Perfluorocompounds (PFCs) are widely used in the semiconductor manufacturing industry as etching gases and chamber cleaning gases. However, PFCs intensely absorb infrared radiation and aggravates global warming consequently. This study applies nonthermal
    Relation: JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES
    Appears in Collections:[環境工程研究所 ] 期刊論文

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