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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/32011


    Title: Crack-free GaN grown on AlGaN/(111)Si micropillar array fabricated by polystyrene microsphere lithography
    Authors: Chen,Guan-Ting;Chyi,Jen-Inn;Chan,Chia-Hua;Hou,Chia-Hung;Chen,Chii-Chang;Chang,Mao-Nan
    Contributors: 電機工程研究所
    Keywords: LATERAL OVERGROWTH;NANOPORE ARRAY;NANOHETEROEPITAXY;SURFACE;SUBSTRATE;SI(111)
    Date: 2007
    Issue Date: 2010-07-06 18:16:30 (UTC+8)
    Publisher: 中央大學
    Abstract: The authors report on the growth of GaN on AlGaN/(111)Si micropillar array by metal-organic chemical vapor deposition. Using the substrates with micropillar array, 2-mu m-thick GaN films without cracks can be achieved. Transmission electron microscopy, at
    Relation: APPLIED PHYSICS LETTERS
    Appears in Collections:[電機工程研究所] 期刊論文

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