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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35349


    Title: Effect of thermal annealing on the optical properties and residual stress of TiO2 films produced by ion-assisted deposition
    Authors: Lee,CC;Chen,HC;Jaing,CC
    Contributors: 光電科學與工程學系
    Keywords: TITANIUM-OXIDE FILMS;THIN-FILMS;MICROSTRUCTURE;TEMPERATURE;EVAPORATION
    Date: 2005
    Issue Date: 2010-07-07 14:11:24 (UTC+8)
    Publisher: 中央大學
    Abstract: The effects of thermal annealing of titanium oxide films deposited by ion-beam assistance at annealing temperatures from 100 degrees C to 300 degrees C on the residual stress and optical properties of the films was investigated. The refractive indices and
    Relation: APPLIED OPTICS
    Appears in Collections:[光電科學與工程學系] 期刊論文

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