Semiconductor hollow optical waveguides formed by omni-directional reflectors

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35402

Title:	Semiconductor hollow optical waveguides formed by omni-directional reflectors
Authors:	Lo,SS;Wang,MS;Chen,CC
Contributors:	光電科學與工程學系
Date:	2004
Issue Date:	2010-07-07 14:13:29 (UTC+8)
Publisher:	中央大學
Abstract:	In this study, a hollow optical waveguide with omni-directional reflectors in silicon-based materials was design, fabricated and characterized. By using dry etching technique, plasma-enhanced chemical vapor deposition for Si/SiO2 thin films and covering a
Relation:	OPTICS EXPRESS
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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