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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35662


    Title: Optical monitoring and real time admittance loci calculation through polarization interferometer
    Authors: Lee,Cheng-Chung;Wu,Kai;Chen,Sheng-Hui;Ma,Sheng-Ju
    Contributors: 薄膜技術研究中心
    Keywords: COATINGS
    Date: 2007
    Issue Date: 2010-07-07 15:47:22 (UTC+8)
    Publisher: 中央大學
    Abstract: A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can
    Relation: OPTICS EXPRESS
    Appears in Collections:[薄膜技術研究中心] 期刊論文

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