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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/36124


    Title: Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution
    Authors: Lee,JY;Chen,HY;Hsu,CC;Wu,CC
    Contributors: 光機電工程研究所
    Keywords: SENSOR;REFLECTION;ACCURACY;ENCODER
    Date: 2007
    Issue Date: 2010-07-08 09:43:22 (UTC+8)
    Publisher: 中央大學
    Abstract: A novel method for displacement measurement is presented. The measurement system includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The optical phase variation, which stems from the grating movement, is mea
    Relation: SENSORS AND ACTUATORS A-PHYSICAL
    Appears in Collections:[光機電工程研究所 ] 期刊論文

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