Characterization of GaN epitaxial layers on SiC substrates with AlxGa1-xN buffer layers

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题名:	Characterization of GaN epitaxial layers on SiC substrates with AlxGa1-xN buffer layers
作者:	Lin,CF;Cheng,HC;Feng,MS;Chi,GC
贡献者:	物理研究所
关键词:	VAPOR-PHASE EPITAXY;DEPENDENCE;GROWTH
日期:	1997
上传时间:	2010-07-08 14:05:29 (UTC+8)
出版者:	中央大學
摘要:	High quality GaN epitaxial layers were obtained with AlxGa1-xN buffer layers on 6H-SiC substrates. The low-pressure metalorganic chemical vapor deposition (LP-MOCVD) method was used. The 500 Angstrom thick buffer layers of AlxGa1-xN (0 less than or equal to x less than or equal to 1) were deposited on SiC substrates at 1025 degrees C. The FWHM of GaN (0004) X-ray curves are 2-3 arcmin, which vary with the Al content in AlxGa1-xN buffer layers. An optimum Al content is found to be 0.18. The best GaN epitaxial film has the mobility and carrier concentration about 564 cm(2) V-1 s(-1) and 1.6 x 10(17) cm(-3) at 300 K. The splitting diffraction angle between GaN and AlxGa1-xN were also analyzed from X-ray diffraction curves. (C) 1997 Elsevier Science S.A.
關聯:	MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
显示于类别:	[物理研究所] 期刊論文

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