本篇論文研究在透明導電層上製作高分子聚合物(Polymer，man2403)微奈米光學結構於氮化鎵發光二極體，使用有限時域差分法(Finite Difference Time Domain，FDTD)光學模擬與製作在固定填充因子(Filling factor)為0.3時改變週期與線寬(分別是週期1.2 μm 線寬0.4 μm(Type II)、週期0.9 μm 線寬0.3 μm(Type III)及週期0.6 μm 線寬0.2 μm(Type IV))的高分子聚合物微奈米光學結構進行發光二極體光型調制研究。 利用FDTD光學模擬各個週期的光型圖，在週期1.2 μm的光型調制行為，正負49度造成較大輻射角度的側向光散逸。在週期0.9 μm的光型調制行為在正負41度有最大的光強度峰值，在週期0.6 μm時的光型調制行為會侷限在正負15度內具有高指向性。 藉由FDTD模擬放置單顆點光源於結構正下方、結構正下方右側邊緣及兩組結構之間方式，更清楚分析高分子聚合物微奈米結構本身及週期排列對於氮化鎵發光二極體光場分佈影響，了解主動層發出的光源經過微奈米結構後光型的調制行為。證實在週期越小(週期0.6 μm)光源有較高的指向性，在週期越大(週期1.2 μm)有較大的輻射角度。 在電特性方面，有無製作高分子聚合物微奈米結構其順向偏壓變異量低於0.62 %。證實在透明導電層上製作高分子聚合物微奈米結構，對發光二極體在順向偏壓的損害甚小。 藉由高分子聚合物微奈米光學結構在不傷害發光二極體的電性下，可以有效達到調制光型與增強光萃取效率的效果，使光型調制成高指向性(正負15度內)與均勻光源(正負30度內)。 In this paper, the light pattern modulation is proposed for polymer (man-2403) micro-nano structures on transparent conductive layer in GaN light-emitting diodes (LEDs). By using the finite difference time domain (FDTD) method and E-beam lithography in the filling factor of 0.3 to discuss the influence of light pattern modulation. Light pattern modulation of Type II , Type III and Type IV by using FDTD method. Type II : uniform light pattern within ±30° .Type III : maximum of two peak intensities at the angle = ±41°. Type IV : high directional light pattern within ±15°. The point light source chosen for providing a good resolution for observing the light modulation caused by the polymer micro-nano structures. The deviation of light pattern between the experimental and simulated results may result from the spatial intensity distribution resolution of Electroluminescence system and the surface roughness of transparent conductive layer. At an injection current 20 mA, the polymer micro-nano structures on the conductive transparent layer results in an increase of optical output power by 5.97 %, 7.35 %, and 3.77 % for Type II, Type III and Type IV, respectively. In electrical characteristics, the availability of polymer micro-nano structures made variation of forward bias voltage within 0.62 %. The damage of forward bias voltage was small.
