半導體產業在臺灣耕耘三十多年來,從IC設計、製造、封裝、測試到系統產品,整個產業鏈相當完整,在國際上己是舉足輕重之地位。根據國際半導體設備材料產業協會(SEMI; Semiconductor Equipment and Materials International)統計,台灣地區對半導體設備需求己位居全球第一。經由設計精良的設備,才能讓商品化的產品達到品質穩定,並且可以達到大量生產的目的,以降低生產成本。然而臺灣在關鍵性設備的腳步還是無法與歐、美、日、韓等製程設備業者相抗衡。 本論文首先將半導體設備業市場特性及發展概況做資料滙整,說明其所存在問題及主要原因,並針對本研究所使用的QFD文獻匯整。本研究應用產品機能展開方法結合半導體設備設計來發展快速且有效率的設備研發。最後,由本研究案例及結論顯示,應用產品機能展開可加速導入半導體設備研發的決策時效,並有效找出開發設計上的瓶頸,可供半導體設備商作為產品研發決策模式之參考。During the past 30 years, Taiwan semiconductor industry has ever been set up by complete supply chain including design, manufacture, assembly, and testing, and played a worldwide significant role. Referring to SEMI’s (Semiconductor Equipment and Materials International) summary, Taiwan has been the most important market of global semiconductor equipment. Unfortunately, Taiwan’s local equipment makers stay behind overseas competitors in the aspect of key components. This research is to survey the market and development of semiconductor equipments. Moreover, related issues and their causes are also reviewed. Mainly, QFD is used, in this thesis, to implement efficient semiconductor equipment development. We conclude that QFD is effective to find out the bottleneck of the equipment development, and also a feasible way for development strategy.