本論文提出一套新穎的量測技術「靈敏度可調式表面電漿共振感測器」，利用外差干涉術量測共振現象的相位變化，具有高靈敏度、高解析度的優點。此外，透過調整系統中的四分之一波片方位角，可達到依待測物調整靈敏度的效果，是一套有潛力的二維度量測系統。 本研究使用純水溶液及不同濃度的酒精水溶液估算系統靈敏度及解析度，當待測物折射率較大時，增加四分之一波片方位角度可使系統有較佳的靈敏度；當折射率差異較大時，亦可調整方位角度使偵測區間增大。 經實驗證明本系統最佳靈敏度達1.7×10^5(°/RIU)，在系統穩定度為0.09度的情況下，最佳解析度達5.3×10^-7RIU，偵測範圍達2mm×2mm。 A novel optical measurement technology “Sensitivity-tunable surface plasmon resonance sensor” is proposed. This system has advantage of high sensitivity and high resolution by employing heterodyne interferometry for SPR phase detection. Besides, the sensitivity is tunable according to difference of samples by adjusting the azimuthal angle of quarter wave plate. This technique is quite a potential sensing system with two-dimension. In this study, the pure water and alcohol solutions are used to estimate sensitivities and resolutions. Increasing the azimuthal angle makes a better sensitivity while sample’s refractive index is higher. In additional, to tune the quarter wave plate can provide a larger dynamic range as the difference of refractive index larger. According to the results, the best sensitivity of this system is 1.7×10^5 (°/RIU). The resolution is 5.3×10^-7 RIU with the stability of phase drift 0.09 degree. Meanwhile, the sensing area is 2mm×2mm.
