本論文研究的目的是研製與發展以數位訊號處理器為基礎之智慧型同動控制系統，以達到龍門式定位平台各軸的精密定位控制與雙線性馬達間有效的同動控制與強健性之目的。本論文採用的龍門式定位平台是由三台永磁線型同步馬達所組成的。龍門式定位平台的機構特點，為利用雙平行線性馬達來驅動單一運動軸以增加驅動推力，即具有機構耦合之雙線性馬達，因此雙線性馬達間的同動控制便成為龍門式定位平台控制的重大課題。由於雙軸間的機構耦合效應所產生的同動誤差會造成控制性能的下降，因此本論文首先針對龍門式定位平台推導了以Lagrangian方程式為基礎之三自由度龍門動態模型。接著為了使龍門式精密定位平台能在參數變化、摩擦力、外來干擾與多軸系統中交叉耦合干擾的影響下具備強健之控制性能，本論文提出了以下兩種智慧型同動控制系統：以三自由度龍門動態模型為基礎之第二型區間遞迴式模糊類神經網路控制系統和以三自由度龍門動態模型為基礎之智慧型無奇點終端滑動模態控制系統，利用智慧型控制的線上學習能力與快速收斂特性來達到各軸的精密定位控制與雙線性馬達間有效的同動控制與強健性之特點。而所提出的兩種智慧型同動控制系統皆實現於以32位元浮點數運算的數位訊號處理器TMS320VC33。最後由實作結果加以驗證所設計的控制器之有效性與可行性。 The objective of this thesis is to develop and implement digital signal processor (DSP) based intelligent synchronous control systems for a gantry position stage, which is composed of three permanent magnet linear synchronous motors (PMLSMs), to achieve precision position control for each motor and effective synchronous control for dual linear motors with robustness. In the configuration of the gantry position stage, two parallel linear motors are physically coupled with a mechanism to realize one-degree movement to enhance the driving force. Hence, the synchronous control of the dual linear motors has become a challenge in the gantry position stages. In this thesis, to consider the effect of inter-axis mechanical coupling which degenerates control performance and results in synchronous error, a Lagrangian equation based three-degree-of-freedom (3-DOF) dynamic model for gantry position stage are derived. Moreover, the control accuracy is much influenced by the existence of uncertainties, which usually comprises parameter variations, external disturbances, cross-coupled interference and friction force. Therefore, two intelligent synchronous control systems with on-line learning capability, fast convergence and robust control characteristics to achieve precision position control for each motor and effective synchronous control for dual linear motors are proposed: a 3-DOF dynamic model based interval type-2 recurrent fuzzy neural network (IT2RFNN) control system and a 3-DOF dynamic model based intelligent non-singular terminal sliding mode control (INTSMC) system. Furthermore, the proposed intelligent synchronous control approaches are implemented in a control computer which is based on a 32-bit floating-point DSP, TMS320VC33. Finally, some experimental results are illustrated to show the validity of the proposed intelligent synchronous control approaches.
