| 摘要: | 隨著積體電路(Integrated Circuit, IC)先進技術的發展，為了增加電路效能，使得電路通道變得更短或閘極氧化層變得更薄，以致於電子元件對靜電放電(Electrostatic Discharge, ESD)的耐受度愈來愈低，對於靜電敏感元件的製造環境要求也就愈來愈嚴謹。電子產品在製造、組裝、測試及運送的過程中，都可能因為接地系統不健全、人員操作不當或沒有適當的靜電防護措施，而產生靜電放電的現象，導致產品的電路毀損或可靠度降低。其中靜電防護措施除了接地系統與物料選擇之外，只有靜電消除器(Ionizer)才能中和絕緣物體上的靜電。 靜電消除器的本身具有多項可供調整的操作因子，包含電壓輸出、Pulse Time、Overlap及Balance等四項，參數設定後所產生的正負離子，經由充電板顯示器(charged plate monitor, CPM)可分別衡量其正電消除時間、負電消除時間、最高峰值電壓及最低峰值電壓等四種指標。先前我們憑藉著經驗，透過不斷試誤來得到所要的結果，這種缺乏系統或方法的設定流程，造成人力的耗費與產能的損失。本研究藉由全因子設計、中央合成設計、反應曲面法及望想函數得到最具影響的因子是Balance及最佳參數組合條件為輸出電壓=70%、Pulse Time=0.955、Overlap=21.72%、Balance=53.1，並依因子的影響性及限制條件，建立可供參考的設定方法。 As the advanced technology development of Integrated Circuit (IC) and in order to increase the circuit efficiency, the circuit channels become shorter and the floodgate extremely oxide layers become thinner which results in the tolerance of electrostatic discharge (ESD) for electronic components become lower. As for the manufacturing environment of electrostatic and sensitive components, the requirement will be more careful. The process of manufacturing, fabrication, test and transportation for electronic products which will be because of the incomplete grounding system, miss operation or no proper prevention action for static charge to result in the ESD, product circuit damage or low reliability. The ESD control program except grounding system and material choice, the ionizer can neutralize the static charge on insulated objects. The operating parameter of ionizer includes power output, pulse time, overlap and balance. The charged plate monitor (CPM) is used to measure the positive discharge time, negative discharge time, high peak offset voltage and low peak offset voltage. In this research, the factorial design, central composite design, response surface methodology and desirability function were used to investigate the most significant factor (Balance) and optimum operating parameter (Power Output =70%、Pulse Time=0.955、Overlap=21.72%、Balance=53.1). Based on the statistical analysis and conditionality, the results have provided much valuable information on the setting method. |
