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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/50263


    Title: Structures and photocatalytic behavior of tantalum-oxynitride thin films
    Authors: Hsieh,JH;Li,C;Liang,HC
    Contributors: 機械工程學系
    Keywords: OPTICAL-PROPERTIES;ELECTRONIC-STRUCTURE;NIOBIUM FILMS;TAON;TA3N5;NITRIDATION;OXIDATION
    Date: 2011
    Issue Date: 2012-03-27 17:08:00 (UTC+8)
    Publisher: 國立中央大學
    Abstract: Tantalum oxynitride films were created by direct nitridation/oxidation during rapid thermal annealing at temperatures 450-700 degrees C. Instead of during deposition, this post process may be proved to be an alternative way to make transition metallic oxynitride films. With sufficient supply of oxygen flow (>= 30 sccm), TaO(x)N(y) was formed as examined from X-ray diffraction (XRD) analysis. This oxynitride film has a broad optical absorption over the range of visible light and sufficient photocatalytic function. For optical absorption, the films' transmittance and reflectance were measured by a UV-VIS-NIR spectrophotometer with wavelengths ranging from 300 to 900 nm. The broad visible light absorption is associated with the formation of band gap in TaO(x)N(y) film, which was examined by the theoretical calculations combining the Beer-Lambert law and Tauc formula. lastly, the photocatalysis of TaO(x)N(y) was gauged by the photodegradation test which measured the reduction of light absorbance affected by the decomposition of methylene blue (C(16)H(18)N(3)SCl center dot 3H(2)O) on TaO(x)N(y) under visible light irradiation. (C) 2011 Published by Elsevier B.V.
    Relation: THIN SOLID FILMS
    Appears in Collections:[機械工程學系] 期刊論文

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