English  |  正體中文  |  简体中文  |  Items with full text/Total items : 67621/67621 (100%)
Visitors : 23027513      Online Users : 504
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version

    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/51957

    Title: Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effects on the properties of deposited thin films by direct current magnetron sputtering
    Authors: Huang,HS;Tung,HC;Chiu,CH;Hong,IT;Chen,RZ;Chang,JT;Lin,HK
    Contributors: 電機工程學系
    Date: 2010
    Issue Date: 2012-03-28 10:11:50 (UTC+8)
    Publisher: 國立中央大學
    Abstract: To obtain a suitable sputtering target for depositing transparent conducting Al-doped ZnO (AZO) films by using direct current (DC) magnetron sputtering, this study investigates the possibility of using atmosphere controlled sintering of Al(2)O(3) mixed ZnO powders to prepare highly conductive ceramic AZO targets Experimental results show that a gas mixture of Ar and CO could produce a sintered target with resistivity in the range of 2.23 x 10(-4) Omega cm. The fairly low resistivity was mainly achieved by the formation of both aluminum substitution (Al(Zn)) and oxygen vacancy (V(O)). thus greatly increasing the carrier concentration. Compared to usual air sintered target, the thin film deposited by the Ar + CO sintered target exhibited lower film resistivity and more uniform spatial distribution of resistivity A film resistivity as low as 6.8 x 10(-4) Omega cm was obtained under the sputtering conditions of this study. ((C) 2010 Elsevier B.V. All rights reserved.
    Relation: THIN SOLID FILMS
    Appears in Collections:[電機工程學系] 期刊論文

    Files in This Item:

    File Description SizeFormat

    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明