本論文是結合光學散射現象和適應性光學系統來增進金屬表面粗糙度量測的準確性。論文研究重點分三部分。(1) 適應性光學系統輔助進行快速金屬表面粗糙度線上量測:此研究為利用適應性光學結合光散射現象來建構一個可用於線上量測金屬表面粗糙度之系統。由實驗的量測結果中，對於五個粗糙度範圍在0.2μm到3.125μm的標準試片，進行量測後得到其各別功光率值與粗糙度之間存在一個良好的相對關係，並且其相關係數R2高達0.9967。(2) 動態空氣擾流環境下之金屬玻璃表面粗糙度量測：近年來金屬玻璃合金由於具有優異的特性而受到相當廣泛的關注，特別是兼具生物相容性的鋯基金屬玻璃材料，在許多研究中指出其表面粗糙度會影響生物細胞的附著、增生、分化。因此，針對鋯基金屬玻璃的表面粗糙度量測進行研究。由結果顯示此量測系統可以進行線上金屬玻璃的表面粗糙度即時估測，並且有效的增進量測準確度與穩定性。(3) 探討流體層對於光學式粗糙度測量之影響及像差校正:針對雷射光束通過金屬表面的流動液體層時所受到的光學像差影響進行實驗上及理論上的研究。由實驗結果顯示，經由適應性光學系統即時的校正過後可以下降RMS值並且改善散射光強度衰減的現象。This study is a combination of the optical scattering phenomenon and an adaptive optics system to improve the accuracy of the measurement of surface roughness. The focus of the study is：(1) This study presents an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R2) of 0.9967.(2) Bulk metallic glasses (BMGs) have received extensive attention recently due to amorphous-related extraordinary properties such as high strength, elasticity, and excellent corrosion resistance. In particular, Zr-based BMGs are recognized as a biocompatible material and surface roughness may affect many aspects of cell attachment, proliferation and differentiation. Therefore, this study presents an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes for all classes of BMGs materials in situ.(3) The induced optical aberration of laser beam passing through a transparent flowing fluid layer on a metal specimen is experimentally and theoretically studied. Real-time AO correction in closed-loop can reduce the wavefront RMS error nd improve the attenuation of scattered laser intensity.
