The semiconductor industry is a large manufacturing industries, has a complex process and business behavior. In the production process relies on computer systems support and ability to get efficiently management and productive resources planning control. Therefore need to implement different system to support internal requirement, however, the most important for the core of the production process is MES system, not only affect the production performance also for the company operating very helpful. Over 90% MES software was provided by professional system provider, although they provide total solution for MES service architecture with its plug-in functions, but its price is prohibitive for small companies. In this study, using the limited resources of the internal development, further integration with the MES system to establish our own process and system, aimed at the integration of existing systems and developing environment to improve the production process, improve product yield rate and work efficiency. In this study, use the service-oriented architecture that has been widely used to do a internal WEB platform to connect the heterogeneous systems, on top of the platform use object-oriented technology to build the core operation of the object, and then classified process needs of different sites. It can be re-established architecture and independent process without any downtime requirement. Its effectiveness in addition to directly improve product quality, shorten the time to solve the problem, reduce costs, also indirectly reduce the problem of FAB management and advocacy electronic benefits.