研究期間：10108~10207;This project proposes a facile and maskless method for fabricating nanofluidic channel arrays using near-field electrospinning (NFES) templates with prescribed patterns and the polydimethylsiloxane (PDMS) molding technique. Nanochannels were fabricated monolithically through three main steps: (1) direct-writing nanofiber arrays onto a silicon substrate using NFES, (2) PDMS molding of the prescribed nanofibers patterns, and (3) plasma treating PDMS substrate to promote the adhesion and bonding process. The nanochannels fabricated in this study had channel widths ranging from 500 nm - 1300 nm and depths of 70 - 500 nm, and were patterned in a fashion similar to the wire bonding process routinely used in the semiconductor industry. The nanochannel dimensions were predominately dictated by electrospun nanofibers, showing that NFES is capable of depositing nanofibers with a diameter down to ~50 nm. Preliminary results show that reliable and repeatable nanofluidic channel arrays were speedily fabricated at a very low cost, while nanofluidic patterns and dimensions are predominantly controlled by NFES in a direct-write, addressable manner. Year two of the proposed project will focus on the application sides of nanofludic channel arrays developed from year one such as single molecule detection via a single nanochannel and a pressure-driven nanogenerator module based on nanofludic arrays.
