研究期間：10108~10207;Quartz is a very special material. It has good electric, mechanical, thermal stability performance. It also has good piezoelectricity that makes quartz widely used in my industry, including automobile, communication, computers, and electronics. Recently, due to the progress of nanotechnology, many novel quartz applications have been proposed, for examples, microfluidics chips and SAW device for gas and bio molecules detection. This new field combining quartz and MEMS has great potential. The micromachining is the enabling technology; however, it is also a bottleneck. Traditional machining for quartz requires the wire cutting and grinding processes. It is not possible to maintain the same precision when the size scales down. The micromaching or MEMS technology is one of the solutions. Comparing to the maturity of Silicon etching, quartz etching is very difficult and complicated. Wet etching usually affected by the crystallography planes and usually not be able to make high aspect ration structures. On the other hand, dry etching can make high aspect ration structures, but in return of high manufacturing cost. In this project, we use wet etching to make high aspect ratio, and high density nanoneedles and study its formation mechanism. We later use this nanoneedles structure on the SAW device to increase its performance.
