高深寬比之石英晶體奈米針狀結構之製備與功能表面特性研究;Fabrication of High Aspect Ratio Quartz Nanoneedles for Functional Surfaces

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題名:	高深寬比之石英晶體奈米針狀結構之製備與功能表面特性研究;Fabrication of High Aspect Ratio Quartz Nanoneedles for Functional Surfaces
作者:	洪銘聰
貢獻者:	國立中央大學機械工程學系
關鍵詞:	機械工程;材料科技
日期:	2012-12-01
上傳時間:	2014-03-17 14:25:19 (UTC+8)
出版者:	行政院國家科學委員會
摘要:	研究期間：10108~10207;Quartz is a very special material. It has good electric, mechanical, thermal stability performance. It also has good piezoelectricity that makes quartz widely used in my industry, including automobile, communication, computers, and electronics. Recently, due to the progress of nanotechnology, many novel quartz applications have been proposed, for examples, microfluidics chips and SAW device for gas and bio molecules detection. This new field combining quartz and MEMS has great potential. The micromachining is the enabling technology; however, it is also a bottleneck. Traditional machining for quartz requires the wire cutting and grinding processes. It is not possible to maintain the same precision when the size scales down. The micromaching or MEMS technology is one of the solutions. Comparing to the maturity of Silicon etching, quartz etching is very difficult and complicated. Wet etching usually affected by the crystallography planes and usually not be able to make high aspect ration structures. On the other hand, dry etching can make high aspect ration structures, but in return of high manufacturing cost. In this project, we use wet etching to make high aspect ratio, and high density nanoneedles and study its formation mechanism. We later use this nanoneedles structure on the SAW device to increase its performance.
關聯:	財團法人國家實驗研究院科技政策研究與資訊中心
顯示於類別:	[機械工程學系] 研究計畫

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