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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/65138


    Title: 三維導電結構與振動式發電機之研製
    Authors: 馮耀鋆;Feng,Yao-Yun
    Contributors: 光機電工程研究所
    Keywords: 點膠機;導電銀膠;三維微米導電結構;被動式微壓升壓電路
    Date: 2014-07-18
    Issue Date: 2014-10-15 14:41:40 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 近年來由於微機電製程發展迅速,但若要利用微機電製程製作出三維的立體元件,因步驟過於繁瑣複雜且自由度較低,所以三維立體元件在微機電製程製作上有一定的困難度,因此本論文利用三軸移動系統的平台並搭配導電材料進行開發,製作出微型電磁式發電機,進而達到本論文研究之目的。
    本論文目前利用具有導電特性的銀膠,但依銀膠的特性,以現有的系統無法實現,因此在三軸位移平台上安裝加熱盤與CCD檢測系統,因元件尺寸在微米範圍中,因此加工頭尺寸、高度、壓力與速度將直接影響加工後元件的大小,此外,因預計成型的元件約在微米等級,所以馬達移動的精密度、成型的路徑規劃與材料特性匹配也在本論文的研究中,最後再利用論文中所設計的微電壓被動式升壓電路,將元件所發出的電加以利用,若本論文所提出的方法能實現,相信應用在微機電製程中會是項很有貢獻的研究與方法。
    目前本論文利用點膠機搭配導電材料,在懸臂樑上設計並製造出不同的導電結構,透過振動使元件發電,而後將其電能作升壓的動作;目前經由線寬點膠測試結果歸納得到,利用32G規格的不銹鋼針頭,搭配黏滯係數約2652cps的銀膠,可點出線寬約190um的直線與圖案,將其參數點在雲母片與矽晶圓上進行元件之製作,再透過振動器(shaker)模擬振動環境進行發電,當元件在10匝,與磁鐵間距約為1.5mm的情況下,振動發電在加速度2.4g下可產生3.16mV的電壓,元件功率為0.1uW,預期後續將其接在變壓器上,達到被動式升壓電路的最低工作輸入電壓,並將其電壓升至2.7~5V可調,而後進行儲能或其它應用。
    ;In this paper, a micro electromagnetic energy harvester capturing mechanical vibrational energy from environmental activities is proposed. The harvester is built on a cantilever microstructure, on which a coil locates. Through the Faraday′s law of induction, the coil generates alternating electrical power with vibration. A 3-axis dispenser is used to form the coil with conductive ink and insulating materials. The parameters of the dispenser including needle size, pressure, temperature, speed and material property are controlled for appropriate shape and size of the coil. The energy harvester is aimed to generate power in the low frequency range, which is below 500 Hz. Experimental measurement is performed on a shaker, which is controlled by a function generator. To store the power for future use, a passive step-up charging circuit, including a transformer, a rectifier and a step-up circuit, is utilized to convert ac power into dc power.
    Appears in Collections:[光機電工程研究所 ] 博碩士論文

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