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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6747


    Title: 以微機電製程技術製作Fabry-Perot型濾光片Fabrication;of Fabry-Perot filters with MEMS technology
    Authors: 商中道;Chang-Dau Sung
    Contributors: 光電科學研究所
    Keywords: 法布理-柏羅 濾光器;Fabry-Perot filters
    Date: 2003-07-10
    Issue Date: 2009-09-22 10:27:25 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 在本論文中主要以可見光做為入射光源,利用玻璃做為基板,鍍上金屬膜做為高反射層與導電層後,反射率約可達 ,分別以空氣及液晶做為共振腔內的介質,利用電壓的加入改變液晶之折射率,使共振腔的光學厚度產生變化,以此特性做出可調式的Fabry-Perot型濾光片。另外我們利用體型細微加工的濕蝕刻技術,在矽晶圓上開出厚度 、大小約 的氮化矽薄膜做為透光區域,在氮化矽薄膜鍍上金屬膜做為高反射層與導電層,以空氣做為共振腔介質,將Fabry-Perot型濾光片微型化。而微型化的可調式Fabry-Perot型濾光則因為配向方式不佳,易造成膜堆損壞,因而未能完成。
    Appears in Collections:[光電科學研究所] 博碩士論文

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