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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/68334

    Title: 聲波應力感測薄膜整合至具積體化光檢測器之矽光學平台;Monolithic Integration of Photo-detector on Silicon Optical Bench with Acoustic Sensing Membrane
    Authors: 黃靖麟;Huang,Ching-lin
    Contributors: 光電科學與工程學系
    Keywords: 波導;光檢測器;離子佈植
    Date: 2015-07-28
    Issue Date: 2015-09-23 11:20:19 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 本研究中提出一個矽波導光學平台,成功的將面射型雷射、光學檢測器及應力感測薄膜整合於一個元件中,達到一個具高封裝容忍度、低光學損耗的光學平台,驗證了未來應用於光學式麥克風的可行性。
    矽基光學感測平台中,離子佈植的光檢測器響應度為0.3 A/W,以單模光纖光源入射於光學波導中的損耗,其得到的光電流值為155 A,效率為-3.8 dB,而封裝應力感測薄膜後插入損耗,其光電流值為125 A,效率為-4.8 dB。優化光學導波平台特性後,將面射型雷射及應力感測薄膜封裝於矽基光學感測平台,其得到的光電流值為96.9 A,效率為-3.3 dB,光暗電流訊雜比為20 dB。
    ;In this research, we proposed a guided-wave silicon optical bench, which successfully integrates VCESL, sensing membrane and photo-detector for photo-acoustic sensor application. Such a optical bench has advantages including: high assembly tolerance, low optical loss, and monolithic photo-detector.
    The guided wave silicon optical bench has a 45° reflector to efficiently couple the 850 nm light emitted by VCSEL in to polymer waveguide. The sensing membrane is inserted into the air trench on optical bench and the vibration is caused by external inertial force. The vibration of sensing membrane results a variation of optical flux monitored by monolithic photo-detector fabricated by ion implantation.
    The monolithic photo-detector has a high responsivity of 0.3 A/W. When the light source emit into waveguide via SMF in this system, the .optical current is 125 mA. After optimization, the optical bench obtains optical current of 96.9 mA and efficiency of -3.3 dB after integrated VCSEL and sensing membrane by flip-chip bonding. The SNR of photo and dark current is 20 dB. Such a guided wave silicon optical bench provides a solution for photo-acoustic sensor development.
    Appears in Collections:[光電科學研究所] 博碩士論文

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