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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6907


    Title: 相位移動器校正之研究;Calibration of the phase-shifting adapter
    Authors: 盧立瑋;Li-Wei Lu
    Contributors: 光電科學研究所
    Keywords: 相位移動器;相位移校正;壓電材料;phase-shifting adapter;phase-shifting calibration;piezoelectric ceramic
    Date: 2006-07-10
    Issue Date: 2009-09-22 10:31:47 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 相移精度於相移干涉術之量測,是最可代表樣品資料之可靠度。對利用相移干涉術來量測樣品之干涉儀而言,不準確之相移會在計算物體相位上產生誤差。本系統之相位移動器係由三個壓電致動器所構成,因為壓電致動器本身之差異與結構上受到不同應力之影響,在移動的過程中會產生移動不均的問題,意即在推進過程中改變參考面之法線向量,最直接的觀察方式為推動一週期後比較前後之干涉圖,干涉條紋有旋轉與間隔改變之現象,此現象亦反應在相位移之標準差。 針對此問題之解決方式,本論文提出一種校正相位移動器的方式,從理論推導出壓電致動器位移與條紋斜率之關係,從此關係中找出一特殊情況來校正,此方式利用條紋之變化來對壓電致動器之差異進行個別調校,從比對第一張與最後一張影像之差異變化,可發現利用此方法所得到之權重比例,的確改善了移動不均之現象。 The error of the movements of the phase-shifting adapter(PSA) determines the accuracy of measurement to a large degree. For large-apeture and weighty optical elements, we usually use an adapter with three PZTs to hold the tested optical element. It is very important to keep the adapter stretched as a flat. Otherwise, the shifting fringe patterns will rotate, and the distance between fringes will be changed. These phenomena will decrease the precision of phase-shifting interferometry. In this thesis, a method to calibrate a phase-shifting adapter with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. Observing the first and the last interferograms, the unequal movement of the PSA is improved by this method.
    Appears in Collections:[光電科學研究所] 博碩士論文

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