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|Title: ||MOCVD旋轉主軸設計分析與驗證;Design, Analysis and Validation of a Spindle for MOCVD Process|
|Keywords: ||有機金屬化學氣相沉積法;主軸;軸承預壓;磁流體軸封;冷卻系統;MOCVD;Spindle;Preload of bearings;Magnetic rotary feedthrough;Cooling system|
|Issue Date: ||2015-11-04 17:51:51 (UTC+8)|
主軸溫度量測結果顯示主軸中心冷卻效果優於主軸外部冷卻。比較溫度量測實驗與有限元素分析之結果，兩者接近，可驗證本研究所建立之熱傳模型之可信度。另一方面，載盤軸向偏擺最大值為0.113 mm，小於設計目標0.15 mm。主軸振動量測到最大加速度為0.136g，確認此數值不會對機台造成明顯的影響。
;The aim of the paper is to design and manufacture a spindle to apply in a chamber for MOCVD process and validate its performances experimentally. The spindle must be designed as stable and robust to fulfill the extreme requirements, such as high speed, high temperature and vacuum. The main topics of design include therefore the bearing supporting, the sealing and the cooling system.
The bearing supporting in the study is selected as locating-floating arrangement. The located bearing is a set of angular contact ball bearings in back-to-back arrangement to increase the supporting span for enhancement of the shaft stiffness. A deep groove ball bearing is used for the floating bearing in order to share the radial load. In addition, a preload is applied to the bearings in order to increase the stability and the stiffness of the spindle and to reduce the run-out and vibration of the susceptor.
A magnetic rotary feedthrough is used for vacuum sealing, which is located between the located bearings and the floating bear considering the stability of the spindle.
Two kinds of cooling systems are applied in the spindle: housing cooling system and shaft cooling system. The housing cooling system is used to cool down the located bearings and the feedthrough. With consideration that the cooling efficiency of housing cooling is not enough, the shaft cooling system is added.
In order to validate the design, a FEM analysis is conducted for both cooling system. The analysis results are also compared with the results from an experiment.
In order to ensure the spindle applicable for MOCVD chamber, three function validation tests are initiated: temperature measurement of the spindle, run-out measurement of the susceptor and vibration measurement of the spindle. Three cooling conditions are considered in the temperature measurement: magnetic rotary feedthrough cooling, housing cooling and shaft cooling. The axial run-out of susceptor is measured to confirm this error will not affect MOCVD process. The vibration condition of the spindle is also measured by using pose of accelerometers to confirming the stability during operation.
From the results of measured temperature, the cooling efficiency of shaft cooling is better than that of housing cooling. Comparing with the results from the experimental measurement, the results from the heat transfer FEA are in good agreement with the measured results. The max value of axial run-out is 0.113 mm and less than the required value of 0.15 mm. The max. measured acceleration of vibration is 0.136 g. And no significant impact on the spindle is expected. Based on the results, the spindle developed in this paper is applicable for MOCVD chamber.
|Appears in Collections:||[機械工程研究所] 博碩士論文|
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