鈣鈦礦太陽能電池作為最有潛力的材料具有可低溫溶液製程且成本低廉等優點,並藉由調整其元素成分,控制能隙以及表面形貌,到現在已經突破了20%的光電轉換效率,但最佳化元素成分為一個複雜的大工程,大多必須配製數種成分的前驅液後依序試驗,並無較有效的實驗方法。此外,鈣鈦礦太陽能電池要商業化依然有瓶頸,缺少能夠同時兼顧製作大面積、高產量同時擁有高品質薄膜的製程方法。 本研究採用超音波噴塗技術結合多通道注射幫浦的調控系統製備鈣鈦礦太陽能電池,此系統能藉由調控注射幫浦的流量來直接改變鈣鈦礦前驅液元素成分,提供一種能迅速最佳化成分比的實驗方法,省略繁瑣的實驗步驟與節省許多原料。本研究首先以最佳化鈣鈦礦鹵素成分為目標,分別利用PbI2、MAI、MABr以及PbI2、PbBr2、MAI兩種系統尋找CH3NH3PbI3-xBrx的最佳比例,比較使用不同的溴離子來源是否會對鈣鈦礦晶體尋找最化比例產生影響。而後,為了獲得更效率的鈣鈦礦太陽能電池元件,在熱退火階段使用真空閃蒸輔助法(Vacuum-assisted method)協助鈣鈦礦成晶,成功獲得大晶粒且平整的高質量鈣鈦礦薄膜,獲得17.1 %的光電轉換效率。此外,利用超音波噴塗的特性來製備大面積的鈣鈦礦薄膜,在最佳化噴塗參數以及使用真空閃蒸輔助法後成功製作了面積為70 cm2的高質量鈣鈦礦薄膜,最高效率達17 %且平均為14.95 %的光電轉換效率。此製程不但能獲得高效率的鈣鈦礦太陽能電池,更證明了放大製程以及商業化的可能性。 ;Perovskite solar cells as the most promising material due to low temperature solution processability and low cost have surpassed 20% power conversion efficiency through change element composition. Tuning the composition will change the band gap and the morphology, but it is a complicate procedure to optimize element composition. In general, several composition of precursor must be prepared and tested sequentially. Lack of efficient experimental method to optimize component rapidly. Moreover, it is necessary to develop practical processes that enable the fabrication of up-scale, high-throughput, and high-quality thin films. In this study, perovskite solar cells are fabricated via ultrasonic spray-coated technology combined with multi-channel syringe pump control system. The system provides an experimental method to optimize composition rapidly through adjusting different pumping rates of precursor, and simplifying cumbersome experimental steps and saving raw materials. First, we aim to optimize the halide ratio of CH3NH3PbI3-xBrx precursor based on PbI2, MAI, MABr, and PbI2, PbBr2, MAI respectively. Then, figuring out whether bromide ions from distinguish compounds will have influence on optimizing process. Furthermore, an effective method flash annealing under vacuum is adopted to enhance quality of perovskite thin film with power conversion efficiency of up to 17.1% for small device. Meanwhile, a 70 cm2 high quality perovskite thin film is obtained through optimizing spray-coated parameters and routes with highest efficiency of 17% and 14.95% for average. The process presents a way toward a scalable and industrially compatible manufacturing process capable of creating high-performance perovskite solar cells.