|Abstract: ||在本論文中，我們開發了微製程流程來製作了兩種微帶貼片天線。在第二章中，我們設計並製作了操作於Ku頻段的可調微帶貼片天線在高電阻率矽基板上。我們將八個鐵電可變電容以一邊各四個的方式等間距負載於微帶貼片天線的兩個輻射槽孔，藉由調整鐵電可變電容的偏壓來改變天線的共振頻率。模擬結果顯示，當鐵電可變電容容值由0.25 pF調至0.1 pF時，天線之操作頻率會由14.5 GHz變化至18 GHz，可調頻率範圍為21.9%。在可調頻率範圍內，最大天線增益為−2.38 dBi。我們開發了矽基板貫孔工序，使得鐵電可變電容可以經由貫孔接至基板背面的地，讓可調微帶貼片天線得以實現。量測結果顯示，當鐵電可變電容偏壓由0 V調至9 V時，天線操作頻率會由16.9 GHz變化至17.98 GHz，可調頻率範圍為6.2%。經重新模擬，我們推測可能有些可變電容的貫孔並未貫通，造成可調頻率範圍的縮減|
在第三章中，我們設計並製作了操作於28 GHz的孔徑耦合E形貼片天線於兩面拋光的藍寶石基板上。貼片製作於基板正面，孔徑及微帶線則製作於基板背面。我們使用具背曝功能的曝光機來對準正面與背面的圖樣。微帶線的介電質使用苯並環丁烯；我們並開發了蝕刻苯並環丁烯的製程工序來製作貫孔。量測結果顯示，孔徑耦合E形貼片天線返回損耗 > 10 dB之頻率範圍為28.86 GHz至31.09 GHz，頻寬為8.2%。量測到的操作頻率較模擬值高，經重新模擬，我們發現模擬時使用的基板介電常數應由11.5改為10。
;In this thesis, microfabrication processes are developed to fabricate two types of microstrip patch antennas. In Chapter 2, a Ku-band tunable microstrip patch antenna is designed and fabricated on high-resistivity silicon substrate. Eight ferroelectric varactors are loaded, equally spaced with four on each side, along the two radiating slots of the patch antenna. By changing the bias voltage of the ferroelectric varactors, the resonant frequency of the antenna can be adjusted. Simulation results show that, when the capacitance of the varactors varies from 0.25 pF to 0.1 pF, the operating frequency of the antenna would go from 14.5 GHz to 18 GHz, corresponding to a frequency tuning range of 21.9%. Within the frequency tuning range, the maximum antenna gain is −2.38 dBi. We have developed the recipe for fabricating through substrate via (TSV), which allows us to connect the ferroelectric varactors to the ground on the back of the substrate, making tunable patch antenna possible. Measurement results show that, when the bias voltage of the ferroelectric varactors is changed from 0 V to 9 V, the operating frequency of the antenna varies from 16.9 GHz to 17.98 GHz, corresponding to a frequency tuning range of 6.2%. After re-simulation, we suspect that TSV for some of the ferroelectric varactors may not be successfully punched through, causing the reduction of the frequency tuning range.
In Chapter 3, a 28-GHz aperture coupled E-shape patch antenna is designed and fabricated on double-side-polished sapphire substrate. Patch is fabricated on the frontside of the substrate, whereas aperture and microstrip line are fabricated on the backside. Double-side mask aligner is used to align the patterns on the front and back sides of the substrate. Benzocyclobutene (BCB) is used as the dielectric material for the microstrip line. Recipe is developed to etch the BCB layer to make via holes. Measurement results of the aperture-coupled E-shape antenna show that, the frequency range where return loss is greater than 10 dB is from 28.86 GHz to 31.09 GHz, the corresponding bandwidth is 8.2%. The measured operating frequency is higher than the value predicted by the simulation. After re-simulation, it is found that the dielectric constant of the substrate used in the simulation should be changed from 11.5 to 10.