最後，比較B-score與瑕疵數效率值之間的關係，並觀察和標準分數B-score有何不同的地方。 ;When we doing wafer testing, we constructed the Boomerang chart in a random way. This paper considers the average defects on the basis of the parameters of known wafers. By inferring the number of defects, we hope to define the true meaning of the number of defects on the wafer maps, and then accelerate wafer analysis.
This paper is based on the Poisson yield model, obtains the average defects λ0, and compares characteristic equation λw that established in [5]. After making two parameters equal, we can infer the ideal CL, then join the model of Boomerang bound made by [14], and define a new parameter: defect efficiency
Next, we performed 1.96 times the standard deviation (95% confidence interval), 2.58 times (99% confidence interval) and 3.89 times (99.99% confidence interval) inspection of the equivalent defects, and observed whether the distribution of equivalent defects conform to the normal distribution. Do the same analysis on the defect efficiency.
Finally, compare the relationship between B-score and defect efficiency, and observe how it differs from B-score.
