本研究是利用螺旋刀具電極對鐵基金屬玻璃進行放電加工與電泳沉積法自製複合拋光輪進行微孔側壁拋光之複合加工，實驗主要可分為三個部分，首先以螺旋電極進行放電微孔加工，探討加工參數，包括脈衝時間、間隙電壓、衝擊係數、電極轉速對放電微孔加工精度、加工時間及電極消耗長度等品質特性的影響，第二部分採用電泳沉積法自製複合拋光輪，探討沉積時間及披覆電壓等電泳參數，對電泳沉積後複合拋光輪之成型特徵及成型尺寸的影響，第三部分係使用複合拋光輪對微孔側壁拋光，並使用SEM進行拋光後微孔內表面微結構觀察，以及採用雷射共軛焦顯微鏡量測微孔內表面粗糙度，另進行XRD拋光後微孔內表面結晶相鑑定。 研究結果顯示，在加工參數方面，脈衝時間設定由5 µs延長至20 µs時，加工時間增加48%，電極消耗長度亦同時增加，且在較長之脈衝時間時，會形成較大的破裂坑洞；當間隙電壓由30 V增加到50 V時，入口孔徑、出口孔徑及加工時間皆會增加，間隙電壓為30 V時，電極消耗長度為最長。在衝擊係數為20%時，加工效率與孔徑精度較差，當衝擊係數由20%增加至40%時，加工時間減少74%；電極轉速1150 rpm時，可得到較小之孔徑尺寸及電極消耗長度，以及較佳的微孔側壁形貌。利用本實驗電泳沉積法製作的複合拋光輪對微孔側壁拋光，能將微孔放電後之表面粗糙度Ra值由0.427 µm減少至0.018 µm，已達到鏡面等級。採用XRD相鑑定拋光後微孔側壁表面，側壁表面Si之結晶相生成。 ;The study used helical tool for electrical discharge micro hole drilling (EDMD) process on Fe-based metallic glass and polishing the inner surface of the micro hole by making composite by electrophoretic deposited tool. The experiment can be divided into three parts. In the first part, EDMD was performed by using helical tool. The influence of processing parameter including pulse on time, gap voltage, duty factor and spindle rotational speed on micro hole machining accuracy, machining time and electrode wear length were investigated. In the second part, the influence of parameters such as deposition time and voltage, on the shape of the deposition and diameter of tool. In the third part, the electrophoretic deposited tool was used to polish the inner surface of the electrical discharged micro hole. SEM and LSCM were used to observe and measure the shape of micro hole inner walls and surface roughness. In addition, XRD was used to identify the crystallization phase. In terms of processing parameters, there is a significant increased by 48% in machining time as the pulse on time was increased from 5 µs to 20 µs, and the electrode wear length was increased as well. Also, when the pulse on time was longer, the larger craters were formed. As the gap voltage were increased from 30 V to 50 V, the inlet diameter, outlet diameter and machining time were increased. The tool wear length was the longest at the gap voltage of 30 V. The processing efficiency and the worst micro hole accuracy were obtained at the duty factor of 20%. A significant machining time was decreased by 74% as the pulse on time increased from 20% to 40%. The best micro hole accuracy, tool wear length and the inner surface, were obtained at the spindle rotation speed of 1150 rpm. The composite tool was made by electrophoretic deposition. The surface roughness of the workpiece can be reduced from 0.427 µm to 0.018 µm after the inner surface polishing. The inner surface was polished up to mirror surface. The XRD pattern shows that the crystalline phase of Si was generated after processing.
