| 摘要: | 具微奈米的高分子薄膜，由於其具有透明度，重量輕，柔性和堅固性的特性，使其廣泛被用於化學傳感、熱障、光子器件、顯示器和低成本光伏器件電子元件等領域，傳統製備微奈米結構，常使用PMMA模板輔助法、離子束光刻法及奈米壓印技術法等方法，但相關製程常遭遇製程時間漫長、昂貴、複雜、成本高等缺點。為克服相關製程限制，本研究首度提出一種結合自組裝奈米球微影術(nanosphere lithography)之製程技術，其主要是利用粒徑均勻的高分子微奈米球，透過其彼此的交互作用力在基材上自組裝鋪排形成六方最密堆積排列之微奈米球陣列結構作為遮罩模板，調控奈米球的直徑再結合薄膜鍍製製程及陽極氧化蝕刻條件，成功地製備出具孔徑及間距可調變之薄型陽極氧化鋁奈米通道模板，再利用熱壓法將所需高分子填入奈米通道，成功地製備出具有可撓曲之高長寬比規則有序準直排列一維高分子結構，而所製備規則有序奈米結構，其結構表面形貌具有疏水及超疏水性質，此結構也可以用於微機電工程、微流體工程領域水滴轉寄技術；本研究所開發之新穎製程，相信將可應於製備各式可撓曲液晶顯示器（Liquid Crystal Display, LCD）和等離子顯示面板（PDP）的平板顯示器。?;Recently, the nanoporous anodic aluminum oxide (AAO) have widely used as templates in nanotechnology. On account of their features continuous, well-organized nanostructure, they can easily adjustable morphological properties and wide range of applications such as drug delivery, membrane filtration, antireflection coating, catalysis and synthesis of various nanostructures. To fabricate thin AAO template with regular nanopores arrays, a variety of patterning techniques have been developed such as nanoimprint lithography, polymer template assisted method and e-beam lithography. However, the above-mentioned processed are high cost, operational complexity and low processing speed make them challenging to use. In this work, we fabricated the thin polymer micro/nanostructures to combine of nanosphere lithography, anodizing and hot-embossing process approach to fabricate thin AAO templates, which is based on the nanosphere lithography with multistep anodizing and etching pore-widening process. The pore diameters, pore lengths can be varied by changing the anodization parameters such as the type of the electrolyte, the electrolyte concentration, the working temperature, the applied voltage and the working time. To fabricate the double-sized diameters template for producing double-sized polymer nanocones. The polymer nanostructure has a hydrophobicity and superhydrophobicity. Wettability of the solid surface is an important property because controlling the surface wettability is significant in many functional applications in MEMS, micro-fluid, and biomaterials. The polymer nanostructures had the potential of liquid transportation. In addition, the polymer micro/nanostructure are widely used in liquid-crystal display and plasma display panel because it has the characteristics of transparency, light weight, small size, flexibility and robustness. |
