在過去的幾年中，光學雷達已成為許多不同領域的關鍵技術，例如:機器人、醫療應用以及自動駕駛等等。而目前最常使用的光達系統主要有兩種技術，一種是飛行時間（ToF）光學雷達，另一種則為調頻連續波(FMCW)光學雷達。在此篇論文中，我們展示了一種雙層累增層 In0.52Al0.48As 的累增崩潰光二極體，其在蓋格模式與線性模式操作下優良的特性，讓我們的累增崩潰光二極體可同時應用於飛行時間（ToF）光學雷達與調頻連續波(FMCW)光學雷達。 我們的累增崩潰光二極體結構中擁有雙層累增層的設計，其有效地將累增崩潰過程侷限在一個薄的高電場區域，而非讓整個厚的累增層發生崩潰。因此，與直接縮小累增層厚度相比，它最大限度地減少了空間電荷效應，同時避免了穿隧電流的增加，並且將特殊設計的蝕刻平台型結構與這種雙層累增層結構結合，我們可以很好地抑制邊緣崩潰。 透過將元件操作在蓋格模式，我們最終實現了在溫度 200K 與 10kHz 的閘控頻率下達到 61.4%的單光子偵測效率與 65ps 的時基誤差，並且有效避免後脈衝效應所帶來的影響。同時透過將元件操作在線性模式(0.9Vbr)，元件亦可擁有高增益頻寬積(450GHz)和高飽和電流 (>12mA)的性能，此外，在高輸出光電流(7 mA)下具有 6.3 A/W的高響應度與+6.95 dBm 的高光輸出功率。我們的累增崩潰光二極體元件展示出優秀的性能，其為未來光學雷達系統的接收器開闢了新的途徑。;Light detection and ranging technology(Lidar) has become a crucial technology in many different areas including robots, medical applications as well as in autonomous vehicle over the past few years. The two most used lidar techniques which meet these requirements, involve the pulsed beam based on the time-of-flight(ToF) principle and frequency-modulated continuous wave (FMCW) approaches. In this work, we demonstrate a dual multiplication layers In0.52Al0.48As based avalanche photodiode, which is desired for ToF lidar and FMCW lidar application due to its high performances in both Geiger mode and linear mode operations. The dual M-layer design in our APD structure effectively constrains the multiplication process to a thin high-field region rather than the whole thick M-layer. It thus minimizes the space charge effect and avoids increasing the tunneling dark current for the case of directly shrinking M-layer thickness. By combining the specially designed mesa shape with this dual M-layer structure, the edge breakdown can be well suppressed. We eventually achieve a single photon detection efficiency of 61.4% and neat temporal characteristic of 65ps without the involvement of afterpulsing at the gating frequency of 10 kHz for 200 K in Geiger mode operation. On the other hand, we can also achieve high gain-bandwidth product (450GHz) and high saturation current (>12mA) under linear mode (0.9 Vbr) operation. The corresponding photo-generated RF power from our APD with a 6.3 A/W responsivity can be as high as +6.95 dBm at a high (7 mA) output photocurrent. The demonstrated APD opens new possibilities in the receiver-end of next generation lidar.
