隨著微流體領域中對於複雜三維微結構需求的增加，製造微流體裝置的三維結構的方法變得越來越重要。本研究探討了五軸電腦數控銑床（工作臺傾斜型）技術在製造具有三維微結構的金屬微模具方面的可行性，並使用銅作為模具材料，應用於聚合物PDMS複製以製造三維微結構。研究過程中重點探討了五軸CNC在多軸微加工中的優勢與挑戰。由於在五軸CNC（工作臺傾斜型）上加工平面板材時受限於刀具尺寸和刀具夾頭干涉所產生的加工限制，本研究提出了一種評估五軸加工允許旋轉角度範圍的方法，以有效快速評估及利用五軸CNC A軸的實際應用旋轉角度範圍，以提高製造效率。本研究在五軸CNC微銑削技術中，通過優化加工參數和使用加長型的深溝型立銑刀，製造出高達AR 20的高深寬比矩形微流道；在同一道工序中製造出具有傾斜角60°和75°且AR 0.5至10不等的高深寬比斜槽微結構。此外，透過五軸CNC微銑削技術結合球型微銑刀，製造出表面精度達到0.0609至0.1093µm的金屬三維曲面微模具，並用於PDMS聚合物複製銑。展示了五軸CNC微銑削技術在聚合物微流體領域中的應用潛力。;With the increasing demand for complex three-dimensional microstructures in the microfluidic field, the methods for fabricating three-dimensional structures in microfluidic devices have become increasingly important. This study investigates the feasibility of using five-axis computer numerical control (CNC) milling (table-tilting type) technology to manufacture metal micro molds with three-dimensional microstructures, using copper as the mold material, and applying it to polymer PDMS replication to create three-dimensional microstructures. The research focuses on the advantages and challenges of five-axis CNC in multi-axis micro machining. Due to the limitations imposed by tool size and tool holder interference when machining planar substrates on a five-axis CNC (table-tilting type), this study proposes a method for evaluating the allowable rotation angle range for five-axis machining. This method enables effective and rapid assessment and utilization of the practical application rotation angle range of the five-axis CNC A-axis, thereby improving manufacturing efficiency. By optimizing machining parameters and using extended deep-groove end mills, this study achieved high aspect ratio (AR) microstructures up to AR 20 in three-axis micro milling. In five-axis micro milling, the same process produced high aspect ratio slanted groove microstructures with tilt angles of 60° and 75° and ARs ranging from 0.5 to 10. Additionally, using ball end mills with five-axis CNC micro milling technology, metal three-dimensional curved surface micro molds with surface precision ranging from 0.0609 to 0.1093 µm were fabricated and used for PDMS polymer replication. This demonstrates the application potential of five-axis CNC micro milling technology in the polymer microfluidic field.
