高功率單模態的面射型雷射，一直是近年來大家努力的方向之一。主要受限於發光的孔徑大小，單模態面射型雷射的特性，一直難以提昇。 本文從環形的發光孔徑出發，藉由鋅擴散和離子佈值技術，嘗試以不同的發光幾何孔徑，來達成高功率和單一空間模態的操作特性， 在實驗上，主要設計並製作了兩種幾何圖形作為發光孔徑，分別是環形發光孔徑和花瓣狀的環型發光孔徑。他們都是由雷射陣列的觀點來審視，尤其是後者，實際的發光孔徑就是雷射陣列。從量測得到的特性上，環形的元件可達到14 mW 的高功率，2 mW單模功率。而花瓣狀的環型發光孔徑，也具有14 mW 的高功率，單點(single spot)的功率更大於7.5 mW，而且兩者都具有半高寬在5-6度之間的低發散角。這也證明了這種幾何圖形的發光孔徑，搭配上鋅擴散和離子佈值技術，具有相當優異的特性。 High power and single spatial mode vertical cavity surface-emitting lasers ware developed in recent years. It’s mainly limited by the magnitude of light-emitting aperture, the characteristics of single mode VCSEL is difficult to improve. In this thesis, we demonstrate the single spatial mode vertical-cavity surface-emitting lasers (VCSEL) with a ring-shaped light-emitting aperture and single spot floral ring-type laser array, respectively. These devices are realized by the Zn diffusion and ion-implantation technique, at a wavelength of 850nm. Relative to the control VCSEL with an ordinary circular aperture and the same geometry and size, these demonstrated devices can suppress the higher-order transverse mode more effectively without affecting the threshold current and output power. Compared with typical reported single-mode VCSELs, a larger light-emitting aperture and current-confined area with a smaller divergence angle of the output beam, and lower differential resistance are achieved with these present structures.
