Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/30794

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30794

Title:	Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry
Authors:	Hsu,CC;Lee,JY;Su,DC
Contributors:	機械工程研究所
Date:	2005
Issue Date:	2010-07-06 16:27:32 (UTC+8)
Publisher:	中央大學
Abstract:	in this article, we report an alternative method for in situ monitoring of the thickness and refractive index of thin film during the growth process. We design a special structure with a thickness-controlled air film to simulate the process of thin film g
Relation:	THIN SOLID FILMS
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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