本論文針對兩種反射鏡變形進行光機整合分析，前半部為口徑620mm Zerodur準直儀反射鏡變形分析，旨在探討支撐與調整機構對鏡面變形產生的影響。主鏡的材料種類、減重結構形式、支撐與組裝方式等因素會影響主鏡成像品質，本研究利用有限元素法，通過改變邊界條件與支撐位置貼近真實工作情形，再利用調整螺絲對主鏡自重變形進行改善，最後得到最佳調整結果。第二部分則利用相同光機分析流程，對八吋反射鏡片以RTV(Room temperature culcanizing)膠合固定方式進行模擬，從溫度、膠黏面積與共振頻率等方面進行探討，最後串聯最佳化軟體找出最佳膠合厚度。實驗方面則利用最佳化設計的膠合模型，設計相對應的灌膠輔助治具完成六片式分散式膠合，並且藉由環境溫度的改變，驗證膠合固定對鏡面的影響，同時以干涉儀進行量測。 一般光學分析不易計算鏡面受力變形對光學品質所產生的結果，本研究建立一套光機分析的流程，使用自行撰寫光機轉換程式，整合有限元素法與Zernike多項式曲面擬合，能將鏡面變形之節點資料匯入程式中進行分析，結合模擬在結構變形上的預測，進而觀察對光學層面上的影響，以利後續光學機構設計目的使用。 ;This article builds an opto-mechanical analysis process based on finite element analysis and optimization. The deformation and stress of mirror caused by supporting and adhesives were discussed in this study. A 620 mm collimator mirror made of Zerodur was analyzed to obtain the deformation induced by gravity. The lightweighting structure and supporting structure of mirror also affect the optical quality. The best performance of the collimator mirror was investigated through several analysis under different boundary conditions, supporting positions of the inner ring and the adjustment actuators. The data of deformation of the mirror was obtained by using finite element analysis, Zernike polynomial was also adopted to fit the optical surface to calculate the corresponding aberrations by using opto-mechnacal analysis program. On the other hand, selecting the proper thickness of RTV elastomer is critical to minimize the effect of geometry, structure and thermal variation. Eventually, the best thickness of RTV elastomer was found by using optimization algorithm connected to finite element analysis.
