本論文提出一應用Shack-Hartmann波前檢測儀之稜鏡式氣體折射率量測系統，光路中設置三角稜鏡，稜鏡會直接接觸待測氣體，使光路因折射率不同而產生偏折，並且可以依照待測氣體之折射率範圍挑選其適合之稜鏡。根據本文所使用之光路系統，及Shack-Hartmann波前檢測架構，搭配廣泛運用於波前檢測中之澤爾尼克(Zernike Polynomials)多項式，可推算得該氣體折射率。相比於一般量測稜鏡偏轉角之氣體折射率量測系統，藉由Shack-Hartmann波前檢測儀之微透鏡陣列，可以使取樣更多且更精確地取得偏轉角及氣體折射率。;The refractive index of gas plays an important part in a lot of industries. For example, determining the refractive index of gas can analyze the compound in the environment. A lot of techniques had been developed to measure the refractive indexes of gases, such as interferometry. The deviation angle of the prism is also widely used in sensing of refractive index of gas. A Shack-Hartmann wavefront sensor is formerly known as a Hartmann wavefront sensor. It is applied to detect the aberrations of the optical lens. The aberrations of a lens can be translated into point spread function (PSF) which can also be translated into modulated transfer function (MTF) to analyze the property of the lens. The accuracy of a Shack-Hartmann wavefront sensor is restricted by the lenslet array. In recent years, with the great improvement of the process of the lenslet array, the sensitivity of Shack-Hartmann wavefront sensor was also improved. In this research, we present a new system for measuring the refractive index of gas. The system combines with a prism to measure the refraction by the deviation angle. A Shack-Hartmann wavefront sensor is also used in this system to analyze the wavefront change resulting from the different refractive indexes.
