Applications of Hadamard transform-gas chromatography/mass spectrometry for the detection of hexamethyldisiloxane in a wafer cleanroom

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/100164

Title:	Applications of Hadamard transform-gas chromatography/mass spectrometry for the detection of hexamethyldisiloxane in a wafer cleanroom
Authors:	王家麟;Cheng, Yuan-Kai;Lin, Cheng-Huang;Kuo, Samuel;Yang, Jonathan;Hsiung, Szu-Yuan;Wang, Jia-Lin
Contributors:	理學院化學學系
Keywords:	absorption;air;Air - analysis;Algorithms;AMC (airborne molecular contaminant);Chromatography;Cleanroom;Cleanrooms;Environment, Controlled;Environmental Monitoring - methods;Fourier Analysis;gas chromatography;Gas Chromatography-Mass Spectrometry - instrumentation;Gas Chromatography-Mass Spectrometry - methods;Gas chromatography/mass spectrometry;Hadamard transform;Hexamethyldisiloxane;HMDS;HMDSO;Inverse;Mass spectrometry;Semiconductors;Signal to noise ratio;Siloxanes - analysis;Wafers
Date:	2012-01-13
Issue Date:	2026-04-21 13:51:45 (UTC+8)
Publisher:	Elsevier;Netherlands: Elsevier B.V
Abstract:	摘要： The Hadamard transform-gas chromatography/mass spectrometry (HT-GC/MS) technique was successfully employed for the detection of hexamethyldisiloxane (HMDSO, C 6H 18OSi 2) at the sub-nL/L level in a semiconductor wafer cleanroom. Indoor air samples were collected from the room, according to EPA Method TO-17 using a Tedlar bag where the air samples were allowed to pass through an absorption tube for 24 h. The condensed components were then heated and simultaneously injected into a GC column through a Hadamard-injector, which was operated in accordance with the Hadamard codes. Compared to the single injection used in most GC/MS systems, the signal-to-noise (S/N) ratios were substantially improved after the inverse Hadamard transformation of the encoded chromatogram. Under optimized conditions, when cyclic S-matrix orders of 255, 1023 and 2047 were used, the S/N ratios of the HMDSO signals were substantially improved by 7.4-, 15.1- and 20.1-fold, respectively. These improvements are in good agreement with theoretically calculated values (8.0-, 16.0- and 22.6-fold, respectively). We found that when the HT-GC/MS technique was applied, HMDSO could be detected at the 0.1 nL/L level. 其他題名： J Chromatogr A 出版者： Netherlands: Elsevier B.V 出版日期： 2012-01-13 出處： Journal of Chromatography A, 2012-01, Vol.1220 (13), p.143-146 版權： 2011 Elsevier B.V. 版權： Copyright © 2011 Elsevier B.V. All rights reserved. 識別號： ISSN: 0021-9673 識別號： ISSN: 1873-3778 識別號： EISSN: 1873-3778 識別號： DOI: 10.1016/j.chroma.2011.12.006 識別號： PMID: 22192564
Appears in Collections:	[Department of Chemistry] journal & Dissertation

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