摘要： In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system ( z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted. 其他題名： TIE 出版者： New York: IEEE 出版日期： 2014-07-01 出處： IEEE transactions on industrial electronics (1982), 2014-07, Vol.61 (7), p.3704-3712 資源來源： IEEE Electronic Library (IEL) 版權： Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jul 2014 識別號： ISSN: 0278-0046 識別號： EISSN: 1557-9948 識別號： DOI: 10.1109/TIE.2013.2279352 識別號： CODEN: ITIED6
