Institute of Electrical and Electronics Engineers Inc.;IEEE
摘要:
摘要： We demonstrate novel structures of an 850-nm vertical-cavity surface-emitting laser (VCSEL) array for high output power, single-lobe far-field pattern, and narrow divergence angle. By using the Zn-diffusion process with proper sizes of oxide-current-confined and Zn-diffusion apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode suppression ratio > 30 dB) with a narrow far-field divergence angle (9^{\circ} - 10^{\circ}) and high maximum single-mode output power ( \sim 6.3 mW). Due to the high uniformity of single-mode performance of each VCSEL unit, the 6 \times 6 array exhibits an excellent lasing phenomenon, which includes single-lobe far-field pattern, weak in-phase coupling, narrowing of divergence angle (from 9 ^{\circ} to 4 ^{\circ} ), and output power as high as around 104 mW. Furthermore, by measuring the bias-dependent output optical spectra in different positions of our array, the high similarity of these spectra indicates the excellent uniformity of our fabrication process for single-mode VCSEL. 其他題名： JPHOT 出版者： IEEE 出版日期： 2013-12-01 出處： IEEE photonics journal, 2013-12, Vol.5 (6), p.1502508-1502508 資源來源： IEEE Xplore 識別號： ISSN: 1943-0655 識別號： ISSN: 1943-0647 識別號： EISSN: 1943-0647 識別號： DOI: 10.1109/JPHOT.2013.2287559 識別號： CODEN: PJHOC3
