Taylor and Francis Ltd.;Philadelphia: Taylor & Francis Group
摘要:
摘要： A two-mask fabrication process of a four-level Fresnel lens was used to evaluate its characteristics through investigating the effect of SU-8 photoresist on the profile of the focusing lens. A two-step deposition of ZnO films was applied to develop a feasible fabrication of a piezoelectric transducer with the structure Al/ZnO/Pt/Ti/SiO 2 /Si under reasonable conditions, which include deposition pressure of 0.7 Pa and 1.3 Pa, RF power of 100 W and 178 W, and sputtering gas ratio Ar:O 2 = 1:3 and 1:1 for first and second step deposition, respectively. Highly c-axis textured ZnO films were successfully obtained through two-step deposition process. 出版者： Philadelphia: Taylor & Francis Group 出版日期： 2012-01-01 出處： Ferroelectrics, 2012-01, Vol.437 (1), p.70-80 版權： Copyright Taylor & Francis Group, LLC 2012 版權： Copyright Taylor & Francis Ltd. 2012 識別號： ISSN: 0015-0193 識別號： EISSN: 1563-5112 識別號： DOI: 10.1080/00150193.2012.741941
