摘要： In this study, a numerical simulation is performed to investigate the effect of the shape of the heat shield on the oxygen concentration in the melt. The results show that the oxygen concentration in the melt can be significantly decreased by increasing the speed of the argon gas near the crucible wall. This can be achieved by enlarging the horizontal length of the heat shield. The oxygen concentration at the melt–crystal interface varies with the length of the crystal growth. In the initial stage, there is a significant decrease in the oxygen concentration as the growth length increases. There is also a significant reduction in the emission of oxygen from the crucible wall due to the lower melt depth and crucible temperature. The transportation of oxygen impurity towards the melt–crystal interface is suppressed by the vortex motion in the melt. When the crystal exceeds a certain length, the oxygen concentration in the melt–crystal interface starts to increase with increasing crystal length, due to the drop in vortex motion in the melt. ► Effect of heat shield shape on oxygen for CZ furnace is studied. ► Oxygen is decreased by enlarging the horizontal length of the heat shield. ► The oxygen and SiO transport in CZ furnace with the heat shield shape is explained. 出版者： Amsterdam: Elsevier B.V 出版日期： 2012-08-01 出處： Journal of crystal growth, 2012-08, Vol.352 (1), p.167-172 版權： 2012 Elsevier B.V. 版權： 2015 INIST-CNRS 識別號： ISSN: 0022-0248 識別號： EISSN: 1873-5002 識別號： DOI: 10.1016/j.jcrysgro.2011.12.070 識別號： CODEN: JCRGAE
