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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/29770


    Title: Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al-xSc (x=0, 0.4, 0.8 and 1.7 wt.%) targets
    Authors: Lin,Jing-Chie;Peng,Kun-Cheng;Tseng,C. A.;Lee,Sheng-Long
    Contributors: 材料科學與工程研究所
    Keywords: HIGHLY TRANSPARENT;OPTICAL-PROPERTIES;MAGNETRON
    Date: 2008
    Issue Date: 2010-07-06 15:57:31 (UTC+8)
    Publisher: 中央大學
    Abstract: Innovative films ZnO: Al-xSc (in which x = 0, 0.4, 0.8 and 1.7 wt.%) were prepared through RF-sputtering on the ZnO target and DC-sputtering on the Al-xSc alloy targets. X-ray diffraction (XRD) of the films displayed a hexagonal wurtzite textured at (002)
    Relation: SURFACE & COATINGS TECHNOLOGY????
    Appears in Collections:[Institute of Materials Science and Engineering] journal & Dissertation

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